JPS63164937U - - Google Patents
Info
- Publication number
- JPS63164937U JPS63164937U JP5852087U JP5852087U JPS63164937U JP S63164937 U JPS63164937 U JP S63164937U JP 5852087 U JP5852087 U JP 5852087U JP 5852087 U JP5852087 U JP 5852087U JP S63164937 U JPS63164937 U JP S63164937U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heater
- reservoir
- heating
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5852087U JPH0441188Y2 (enExample) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5852087U JPH0441188Y2 (enExample) | 1987-04-17 | 1987-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63164937U true JPS63164937U (enExample) | 1988-10-27 |
| JPH0441188Y2 JPH0441188Y2 (enExample) | 1992-09-28 |
Family
ID=30889169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5852087U Expired JPH0441188Y2 (enExample) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441188Y2 (enExample) |
-
1987
- 1987-04-17 JP JP5852087U patent/JPH0441188Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441188Y2 (enExample) | 1992-09-28 |
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