JPS63164220U - - Google Patents

Info

Publication number
JPS63164220U
JPS63164220U JP5713787U JP5713787U JPS63164220U JP S63164220 U JPS63164220 U JP S63164220U JP 5713787 U JP5713787 U JP 5713787U JP 5713787 U JP5713787 U JP 5713787U JP S63164220 U JPS63164220 U JP S63164220U
Authority
JP
Japan
Prior art keywords
cvd apparatus
wafer
hot plate
heat source
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5713787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5713787U priority Critical patent/JPS63164220U/ja
Publication of JPS63164220U publication Critical patent/JPS63164220U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5713787U 1987-04-15 1987-04-15 Pending JPS63164220U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5713787U JPS63164220U (US07923587-20110412-C00022.png) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5713787U JPS63164220U (US07923587-20110412-C00022.png) 1987-04-15 1987-04-15

Publications (1)

Publication Number Publication Date
JPS63164220U true JPS63164220U (US07923587-20110412-C00022.png) 1988-10-26

Family

ID=30886569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5713787U Pending JPS63164220U (US07923587-20110412-C00022.png) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPS63164220U (US07923587-20110412-C00022.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019102523A1 (ja) * 2017-11-21 2019-05-31 佐伯 午郎 拡散装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019102523A1 (ja) * 2017-11-21 2019-05-31 佐伯 午郎 拡散装置

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