JPS63164215U - - Google Patents
Info
- Publication number
- JPS63164215U JPS63164215U JP5761287U JP5761287U JPS63164215U JP S63164215 U JPS63164215 U JP S63164215U JP 5761287 U JP5761287 U JP 5761287U JP 5761287 U JP5761287 U JP 5761287U JP S63164215 U JPS63164215 U JP S63164215U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- chuck
- wafer
- container
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5761287U JPS63164215U (nl) | 1987-04-16 | 1987-04-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5761287U JPS63164215U (nl) | 1987-04-16 | 1987-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63164215U true JPS63164215U (nl) | 1988-10-26 |
Family
ID=30887481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5761287U Pending JPS63164215U (nl) | 1987-04-16 | 1987-04-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63164215U (nl) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53773A (en) * | 1976-06-10 | 1978-01-06 | Fruehwirth Rudolf | Cigarette dispenser |
-
1987
- 1987-04-16 JP JP5761287U patent/JPS63164215U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53773A (en) * | 1976-06-10 | 1978-01-06 | Fruehwirth Rudolf | Cigarette dispenser |