JPS63164143A - Black matrix type color cathode-ray tube - Google Patents
Black matrix type color cathode-ray tubeInfo
- Publication number
- JPS63164143A JPS63164143A JP30840286A JP30840286A JPS63164143A JP S63164143 A JPS63164143 A JP S63164143A JP 30840286 A JP30840286 A JP 30840286A JP 30840286 A JP30840286 A JP 30840286A JP S63164143 A JPS63164143 A JP S63164143A
- Authority
- JP
- Japan
- Prior art keywords
- black matrix
- blue
- red
- green
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011159 matrix material Substances 0.000 title claims abstract description 17
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 9
- 239000010439 graphite Substances 0.000 claims abstract description 9
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 21
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000004040 coloring Methods 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 3
- 239000003086 colorant Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、カラー陰極線管の表示画面のコントラストを
向上させるブラックマトリクスの形成方法を改善し、画
面表示の白色均一性を少なくとも視感度的に向上させた
ブラックマトリクス形カラー陰極線管に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention improves a method for forming a black matrix that improves the contrast of a display screen of a color cathode ray tube, and improves the white uniformity of the screen display at least in terms of luminous efficiency. This invention relates to an improved black matrix type color cathode ray tube.
カラー陰極線管の、赤、緑、青の3原色に発光する蛍光
体の、ドツト状またはストライプ状パターンや、表示画
面のコントラスト向上のために上記蛍光体パターン周辺
パネル面を黒鉛で被覆し尽くすブラックマトリクスを形
成させる作業は、周知の如く、いずれもホトリソグラフ
ィ技術を利用し、3Jに(色それぞれに別の電子銃を使
用するため。Dot-shaped or striped patterns of phosphors that emit light in the three primary colors of red, green, and blue in color cathode ray tubes, and black where the panel surface around the phosphor patterns is completely coated with graphite to improve the contrast of the display screen. As is well known, the process of forming the matrix uses photolithography technology, and 3J (separate electron guns are used for each color).
シャドウマスクを介して3H色蛍光体用パターンを個々
に繰り返しホトレジスト膜や感光性蛍光体膜などに露光
して行っていた。The 3H color phosphor pattern was individually and repeatedly exposed to a photoresist film, a photosensitive phosphor film, etc. through a shadow mask.
上記形成作業の際の3原色蛍光体用パターンの露光順序
に関しては、既に特許出願もなされているが、従来の発
明の目的は、感光性蛍光体スラリーの繰り返し使用、寿
命延長などの原価低減や。A patent application has already been filed regarding the exposure order of the three primary color phosphor patterns during the above-mentioned formation process, but the purpose of the conventional invention was to reduce costs by repeatedly using the photosensitive phosphor slurry, extending its life, etc. .
混色防止などが主であった。The main purpose was to prevent color mixing.
蛍光体を塗布するためには、通常、感光性蛍光体膜塗布
および露光、現像、所要パターンに固化した蛍光体被膜
の形成という作業を、各色それぞれに対し行っているが
、各色蛍光体パターンの周辺のパネル面を被覆し尽くす
黒鉛のブラックマトリクスは、上記蛍光体の塗布に先立
って、パネル面にまずホトレジスト膜を塗布し、このホ
トレジスト膜に各色蛍光体用パターンの露光を順次計3
回繰り返したのち現像を行い、この上に黒鉛膜を塗布し
、蛍光体パターン部に同化残留したホトレジスト」二に
形成された黒鉛膜を、エツチングによって下層のホトレ
ジストごとにリフI・オフして形成している。To apply phosphor, the following steps are usually performed for each color: coating a photosensitive phosphor film, exposing, developing, and forming a solidified phosphor film in the desired pattern. To create a black matrix of graphite that completely covers the peripheral panel surface, a photoresist film is first applied to the panel surface prior to the application of the phosphor described above, and a pattern for each color phosphor is sequentially exposed to light on this photoresist film for a total of three times.
After repeated development, a graphite film is coated on top of this, and the graphite film formed on the photoresist that remains assimilated into the phosphor pattern area is etched to rev-I-off each underlying photoresist layer. are doing.
ブラックマトリクスを形成させる」1記工程でのホトレ
ジストに対する各色蛍光体用パターンの露光順序に関し
ては、従来特別な配慮や特許出願等を未だ行われていな
かった。Conventionally, no special considerations or patent applications have been made regarding the order of exposure of each color phosphor pattern to the photoresist in step 1 of "forming a black matrix."
本発明は°、ブラックマトリクス形成方法を改善して、
カラー陰極線管の表示画面の白色均一性を少なくとも視
感度的に向上させたブラックマトリクス形陰極線管を提
供することを目的とする。The present invention improves the black matrix forming method,
An object of the present invention is to provide a black matrix type cathode ray tube in which the white uniformity of the display screen of the color cathode ray tube is improved at least in terms of visibility.
上記目的を達成するために本発明においては、ブラック
マ(−リクスを形成させるため、黒鉛膜塗布に先立って
、ホトレジス1へ膜を塗布し、パネルを所定温度に昇温
させてから露光作業を行う際、高温では低温より露光感
度が低いホトレジストを使用する場合は、赤、青、緑蛍
光体用パターンの順に、低温では高温より露光感度が低
いホトレジストを使用する場合は、緑、青、赤蛍光体用
パターンの順に露光し、蛍光体用パターンのドツト径ま
たはストライブ幅が常に赤く青く緑用パターンになるよ
うにした。To achieve the above object, in the present invention, in order to form a black matrix, a film is applied to the photoresist 1 prior to coating the graphite film, and the panel is heated to a predetermined temperature before exposure work is performed. When using a photoresist that has lower exposure sensitivity at high temperatures than at low temperatures, the patterns for red, blue, and green phosphors are used in this order; The dot diameter or stripe width of the phosphor pattern was always red, blue, and green.
カラー陰極線管の表示画面の白色均一性は、3色の絵素
の大きさが同一ならば問題ないが、仮置3色の発光にア
ンバランスが生じていてもtcat PA者に余り気に
ならない場合と、そうでない場合に分かれる。この白色
均一性の劣化要因は、勿論、3色のアンバランスが主因
であるが、視感度域の影響で、赤の発光が強い場合のマ
ゼンタむら、イエローむらは、緑の発光が強い場合のシ
アンむらよす目立ち、白色むらを悪くする。すなわち、
赤の発光が強すぎた場合は、視感度的に白色むらが劣化
するが、逆の場合は大して目立たないで済む。There is no problem with the white uniformity of a color cathode ray tube display screen if the three color picture elements are the same size, but even if there is an imbalance in the light emission of the three temporary colors, it is not of much concern to the tcat PA operator. It is divided into cases and cases not. The main cause of this deterioration of white uniformity is, of course, the imbalance of the three colors, but due to the influence of the visibility range, magenta unevenness and yellow unevenness occur when red light is strong, and yellow unevenness occurs when green light is strong. Makes cyan unevenness stand out and makes white unevenness worse. That is,
If the red light emission is too strong, white unevenness will deteriorate in terms of visibility, but if the opposite is the case, it will not be noticeable.
ブラックマトリクス形成用ホトレジストに対する露光作
業では、最初の露光を行う時刻と最後の露光を行う時刻
との間には1分以上の時間が経過している。露光に先立
ってパネルの温度を所定の温度に昇温させであるが、上
記のように、各色蛍光体用パターンの露光を行う間に時
間が経過し、パネル温度が低下するので、ホトレジスト
の露光による化学変化の程度(感度)に、露光順序によ
る相違が生ずる。In the exposure work for the photoresist for forming a black matrix, one minute or more passes between the time when the first exposure is performed and the time when the last exposure is performed. Prior to exposure, the temperature of the panel is raised to a predetermined temperature, but as mentioned above, time passes while each color phosphor pattern is exposed, and the panel temperature decreases, so it is difficult to expose the photoresist. The degree of chemical change (sensitivity) caused by exposure differs depending on the exposure order.
例えば、FAA (ポリアクリルアミド)系ホトレジス
トは、パネル温度が高い程、感度が悪くなり、最初に露
光されたパターンの径または幅は小さく、露死順に大き
くなる。また、PVA (ポリビニルアルコール)系、
ADC(重クロム酸アンモン)系では、パネル温度が低
い程、感度が悪くなり、最初に露光されたパターンの径
または幅は大きく、露光順に小さくなる。For example, with FAA (polyacrylamide) photoresists, the higher the panel temperature, the lower the sensitivity, and the diameter or width of the pattern exposed first becomes smaller and increases in the order of exposure. In addition, PVA (polyvinyl alcohol) type,
In the ADC (ammonium dichromate) system, the lower the panel temperature, the worse the sensitivity, and the diameter or width of the pattern exposed first becomes larger and becomes smaller in the order of exposure.
上記のようにブラックマトリクス形成用ホトレジストは
パネル温度、処理温度変動の影響を大きく受け、その結
果、3色蛍光体の絵素の大きさにも影響が及ぶ。しかし
、ホトレジスト露光順序を前記の如くすれば、蛍光体パ
ターンのドツト径やストライブ幅を容易に常に赤く青く
緑色の順に、更に作業管理に注意すれば各色パターンの
大きさを均一にすることも可能で、白色均一性を向上さ
せることが出来る。作業管理に注意するとは、例えば温
度変動が一定の場合、露光量を各色毎に適当に調節して
対応するなどを指す。露光装置はシーケンシャル動作を
行うから、露光順序、露光量を所望の如く設定しておけ
ば良い。As described above, the photoresist for forming the black matrix is greatly affected by fluctuations in panel temperature and processing temperature, and as a result, the size of the picture elements of the three-color phosphor is also affected. However, if the photoresist exposure order is as described above, the dot diameter and stripe width of the phosphor pattern can be easily maintained in the order of red, blue, and green, and if work management is careful, the size of each color pattern can be made uniform. It is possible to improve the white uniformity. Paying attention to work management refers to, for example, dealing with constant temperature fluctuations by appropriately adjusting the exposure amount for each color. Since the exposure apparatus performs sequential operation, the exposure order and exposure amount can be set as desired.
本発明の一実施例を第1図によって説明する。 An embodiment of the present invention will be described with reference to FIG.
ホトレジストの塗布を完了したパネル1にシャドウマス
ク2を装着し、15〜20分コンベア上で放置してから
露光装置に設置する。ホトレジスト成膜時に温度は例え
ば60℃(ホトレジスト中の水分をとばす)であるが1
例えば室!25℃で、最初の露光時の温度42℃から最
後の露光時の温度35℃まで変化する。ホトレジストに
PAA系を用いた場合、まず赤パターン用位置で露光し
、順次、露光光源3の位置を移動させ、青パターン用位
置、緑パターン用位置で露光する。−色の露光は約25
秒から35秒を費やし、90〜120秒で1サイクルが
完了する。ホトレジストが、PVA系、ADC系では、
上記露光順序を逆転させれば良い。A shadow mask 2 is attached to the panel 1 that has been coated with photoresist, and after being left on the conveyor for 15 to 20 minutes, it is installed in an exposure device. The temperature during photoresist film formation is, for example, 60°C (to evaporate moisture in the photoresist), but 1
For example, the room! At 25°C, the temperature changes from 42°C during the first exposure to 35°C during the final exposure. When a PAA-based photoresist is used, exposure is first performed at a position for a red pattern, and then the position of the exposure light source 3 is sequentially moved to perform exposure at a position for a blue pattern and a position for a green pattern. - Color exposure is approx. 25
One cycle is completed in 90 to 120 seconds. If the photoresist is PVA type or ADC type,
The above exposure order may be reversed.
以上説明したように本発明によれば、白色むらの劣化要
因である赤の発色が青、緑の発色より強くなることを防
止することができて白色均一性が向上する。As explained above, according to the present invention, it is possible to prevent red coloring from becoming stronger than blue and green colors, which is a cause of deterioration of white unevenness, and white uniformity is improved.
第1図は本発明実施例の説明図である。
l・・・パネル、2・・・シャドウマスク、3・3・・
・露光光源FIG. 1 is an explanatory diagram of an embodiment of the present invention. l...Panel, 2...Shadow mask, 3.3...
・Exposure light source
Claims (1)
又はストライプ状パターン周辺のパネル面を、表示画面
のコントラストを向上させるために黒鉛で被覆し尽くし
たブラックマトリクス形カラー陰極線管において、ブラ
ックマトリクスの黒鉛に被覆されていない個所に形成さ
れた各色蛍光体のパターンのドット径またはストライプ
幅が赤<青<緑パターンとなるようにしたことを特徴と
するブラックマトリクス形カラー陰極線管。1. In a black matrix type color cathode ray tube, the panel surface around the dot or stripe pattern of red, blue, and green phosphors formed on the inner surface of the panel is completely covered with graphite to improve the contrast of the display screen. A black matrix type color cathode ray tube characterized in that the dot diameter or stripe width of a pattern of each color phosphor formed in a portion of the black matrix not covered with graphite is such that a red < blue < green pattern.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30840286A JPS63164143A (en) | 1986-12-26 | 1986-12-26 | Black matrix type color cathode-ray tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30840286A JPS63164143A (en) | 1986-12-26 | 1986-12-26 | Black matrix type color cathode-ray tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63164143A true JPS63164143A (en) | 1988-07-07 |
Family
ID=17980629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30840286A Pending JPS63164143A (en) | 1986-12-26 | 1986-12-26 | Black matrix type color cathode-ray tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63164143A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5896001A (en) * | 1996-06-28 | 1999-04-20 | Nec Corporation | Black matrix color cathode-ray tube having a red pattern wider than each of green and blue patterns |
US6548954B1 (en) | 2000-06-01 | 2003-04-15 | Hitachi Ltd. | Color cathode ray tube with black matrix holes having different diameters |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167239A (en) * | 1980-05-26 | 1981-12-22 | Nec Corp | Color braun tube |
JPS6010548A (en) * | 1983-06-23 | 1985-01-19 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Fluorescent unit for cathode ray tube |
-
1986
- 1986-12-26 JP JP30840286A patent/JPS63164143A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167239A (en) * | 1980-05-26 | 1981-12-22 | Nec Corp | Color braun tube |
JPS6010548A (en) * | 1983-06-23 | 1985-01-19 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Fluorescent unit for cathode ray tube |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5896001A (en) * | 1996-06-28 | 1999-04-20 | Nec Corporation | Black matrix color cathode-ray tube having a red pattern wider than each of green and blue patterns |
US6548954B1 (en) | 2000-06-01 | 2003-04-15 | Hitachi Ltd. | Color cathode ray tube with black matrix holes having different diameters |
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