JPS63163508U - - Google Patents

Info

Publication number
JPS63163508U
JPS63163508U JP5584987U JP5584987U JPS63163508U JP S63163508 U JPS63163508 U JP S63163508U JP 5584987 U JP5584987 U JP 5584987U JP 5584987 U JP5584987 U JP 5584987U JP S63163508 U JPS63163508 U JP S63163508U
Authority
JP
Japan
Prior art keywords
gas
diaphragm
back pressure
passage
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5584987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5584987U priority Critical patent/JPS63163508U/ja
Publication of JPS63163508U publication Critical patent/JPS63163508U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
JP5584987U 1987-04-13 1987-04-13 Pending JPS63163508U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5584987U JPS63163508U (bs) 1987-04-13 1987-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5584987U JPS63163508U (bs) 1987-04-13 1987-04-13

Publications (1)

Publication Number Publication Date
JPS63163508U true JPS63163508U (bs) 1988-10-25

Family

ID=30884134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5584987U Pending JPS63163508U (bs) 1987-04-13 1987-04-13

Country Status (1)

Country Link
JP (1) JPS63163508U (bs)

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