JPS6343210U - - Google Patents

Info

Publication number
JPS6343210U
JPS6343210U JP13513086U JP13513086U JPS6343210U JP S6343210 U JPS6343210 U JP S6343210U JP 13513086 U JP13513086 U JP 13513086U JP 13513086 U JP13513086 U JP 13513086U JP S6343210 U JPS6343210 U JP S6343210U
Authority
JP
Japan
Prior art keywords
gas flow
gas
valve
differential pressure
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13513086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13513086U priority Critical patent/JPS6343210U/ja
Publication of JPS6343210U publication Critical patent/JPS6343210U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
JP13513086U 1986-09-02 1986-09-02 Pending JPS6343210U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13513086U JPS6343210U (bs) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13513086U JPS6343210U (bs) 1986-09-02 1986-09-02

Publications (1)

Publication Number Publication Date
JPS6343210U true JPS6343210U (bs) 1988-03-23

Family

ID=31037022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13513086U Pending JPS6343210U (bs) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPS6343210U (bs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03122102U (bs) * 1990-03-27 1991-12-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03122102U (bs) * 1990-03-27 1991-12-13

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