JPS63162980U - - Google Patents

Info

Publication number
JPS63162980U
JPS63162980U JP5456687U JP5456687U JPS63162980U JP S63162980 U JPS63162980 U JP S63162980U JP 5456687 U JP5456687 U JP 5456687U JP 5456687 U JP5456687 U JP 5456687U JP S63162980 U JPS63162980 U JP S63162980U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
check valve
casing
side check
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5456687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0629507Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987054566U priority Critical patent/JPH0629507Y2/ja
Publication of JPS63162980U publication Critical patent/JPS63162980U/ja
Application granted granted Critical
Publication of JPH0629507Y2 publication Critical patent/JPH0629507Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1987054566U 1987-04-10 1987-04-10 圧電振動子ポンプ Expired - Lifetime JPH0629507Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987054566U JPH0629507Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987054566U JPH0629507Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Publications (2)

Publication Number Publication Date
JPS63162980U true JPS63162980U (es) 1988-10-25
JPH0629507Y2 JPH0629507Y2 (ja) 1994-08-10

Family

ID=30881677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987054566U Expired - Lifetime JPH0629507Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Country Status (1)

Country Link
JP (1) JPH0629507Y2 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04137280U (ja) * 1991-06-18 1992-12-21 株式会社三鈴エリー 圧電振動子ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588087U (es) * 1978-12-13 1980-06-18
JPS6098181A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
JPS60195986U (ja) * 1984-06-08 1985-12-27 株式会社三鈴エリー 圧電体振動子ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588087U (es) * 1978-12-13 1980-06-18
JPS6098181A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
JPS60195986U (ja) * 1984-06-08 1985-12-27 株式会社三鈴エリー 圧電体振動子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04137280U (ja) * 1991-06-18 1992-12-21 株式会社三鈴エリー 圧電振動子ポンプ

Also Published As

Publication number Publication date
JPH0629507Y2 (ja) 1994-08-10

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