JPS63162870U - - Google Patents

Info

Publication number
JPS63162870U
JPS63162870U JP5484187U JP5484187U JPS63162870U JP S63162870 U JPS63162870 U JP S63162870U JP 5484187 U JP5484187 U JP 5484187U JP 5484187 U JP5484187 U JP 5484187U JP S63162870 U JPS63162870 U JP S63162870U
Authority
JP
Japan
Prior art keywords
jig
attach
grooves
extent
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5484187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5484187U priority Critical patent/JPS63162870U/ja
Publication of JPS63162870U publication Critical patent/JPS63162870U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP5484187U 1987-04-10 1987-04-10 Pending JPS63162870U (US07576130-20090818-C00114.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5484187U JPS63162870U (US07576130-20090818-C00114.png) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5484187U JPS63162870U (US07576130-20090818-C00114.png) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162870U true JPS63162870U (US07576130-20090818-C00114.png) 1988-10-24

Family

ID=30882205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5484187U Pending JPS63162870U (US07576130-20090818-C00114.png) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162870U (US07576130-20090818-C00114.png)

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