JPS6316237A - Force sensor - Google Patents
Force sensorInfo
- Publication number
- JPS6316237A JPS6316237A JP15970586A JP15970586A JPS6316237A JP S6316237 A JPS6316237 A JP S6316237A JP 15970586 A JP15970586 A JP 15970586A JP 15970586 A JP15970586 A JP 15970586A JP S6316237 A JPS6316237 A JP S6316237A
- Authority
- JP
- Japan
- Prior art keywords
- force
- film
- main body
- body part
- waves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920000642 polymer Polymers 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 229920003002 synthetic resin Polymers 0.000 abstract description 2
- 239000000057 synthetic resin Substances 0.000 abstract description 2
- 239000011295 pitch Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 14
- 239000012528 membrane Substances 0.000 description 7
- 239000002033 PVDF binder Substances 0.000 description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- MIZLGWKEZAPEFJ-UHFFFAOYSA-N 1,1,2-trifluoroethene Chemical compound FC=C(F)F MIZLGWKEZAPEFJ-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009998 heat setting Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
従来の技術
高分子圧電膜を利用した力センサには、大別して、膜の
厚み方向に作用する力によるその方向の単なる歪量を電
圧に変換するものと、厚み方向にあける膜のたわみ量を
電圧に変換するものとがある。いずれにおいても、平た
い膜では、作用した力に対する変形量が小さく、微小な
力に対して十分に大ぎな電圧が発生しない。すなわち、
感度が低い。[Detailed Description of the Invention] Prior Art Force sensors using polymer piezoelectric films can be roughly divided into those that convert the amount of strain in that direction due to a force acting in the thickness direction of the film into voltage, and those that convert the amount of strain in that direction into voltage; There is one that converts the amount of deflection of the membrane into voltage. In either case, in a flat membrane, the amount of deformation in response to an applied force is small, and a sufficiently large voltage is not generated in response to a minute force. That is,
Sensitivity is low.
この点を改良せんとして、特開昭５７−１３２６１７号
公報においては、たとえばカップ状に加工した圧電膜を
使用している。このセンサによれば、カップの頂上側か
ら力が作用するようにすることにより、膜を大きく変形
させることができる。In order to improve this point, Japanese Patent Laid-Open No. 132617/1983 uses a piezoelectric film processed into a cup shape, for example. According to this sensor, the membrane can be significantly deformed by applying force from the top side of the cup.
しかしながら、その反対側から作用した力に対する変形
量は小さく、平たい膜を使用した場合とほとんど変わら
ない。すなわち、力の作用方向に関して双方向性かない
。また、頂上側から大きな力が作用すると、塑性変形し
て形が元に戻らないこともある。凹んでしまうわけであ
る。このような理由から、この従来のセンサは、作用す
る力の方向が定まっており、かつ力の大きさにあまり大
きな変動がないような、たとえばキーボード用のスイッ
チなどに用途が限られている。However, the amount of deformation due to the force applied from the opposite side is small and is almost the same as when a flat membrane is used. In other words, there is no bidirectionality in the direction of force action. Also, if a large force is applied from the top side, it may become plastically deformed and may not return to its original shape. It becomes dented. For these reasons, the use of this conventional sensor is limited to applications where the direction of the applied force is fixed and the magnitude of the force does not vary significantly, such as keyboard switches.
発明が解決しようとする問題点
この発明の目的は、従来のセンサの上記欠点を解決し、
力に対する変形（６）か大きくて微小な力に対しても大
きな電圧が１７られ、感度が高い（Ｊかりか、力の作用
方向に関して双方向ｉ生で、広い用途が期待できる力セ
ンサを提供するにある。Problems to be Solved by the Invention The purpose of the invention is to solve the above-mentioned drawbacks of conventional sensors,
Deformation in response to force (6) A large voltage can be generated even in response to a large or minute force, and the sensitivity is high (J-Karika), providing a force sensor that can be used in both directions with respect to the direction of force action and is expected to have a wide range of applications. There is something to do.
問題点を解決するための手段
上記目的を達成するためのこの発明は、波状で、かつ波
が同心的に形成されている高分子圧電膜の両面に電極を
形成してなる力センサを特徴とするものである。Means for Solving the Problems In order to achieve the above object, the present invention is characterized by a force sensor formed by forming electrodes on both sides of a polymer piezoelectric film having a wavy shape and in which waves are formed concentrically. It is something to do.
この発明において使用する高分子圧電膜は、圧電性を有
する高分子の薄膜からなる。具体的には、周知の、たと
えばポリフッ化ビニリデン（ＰＶＤＦ）、ポリフ化ビニ
リデンと三フッ化エチレンとの共重合体（［Ｐ （ＶＤ
Ｆ−ＴｒＦＥ）コ、ポリフ化ごニリデンと四フッ化エチ
レンとの共重合体（［Ｐ （ＶＤＦ−ＴｅＦＥ）１など
を使用することができる。厚みは、１０〜１００μｍ程
度でよい。なお、膜は、通常、適当なホルダに支持され
る。The polymer piezoelectric film used in this invention is made of a piezoelectric polymer thin film. Specifically, well-known materials such as polyvinylidene fluoride (PVDF), a copolymer of polyvinylidene fluoride and ethylene trifluoride ([P (VD
F-TrFE), a copolymer of polynylidene polyfluoride and tetrafluoroethylene ([P(VDF-TeFE)1, etc.) can be used.The thickness may be about 10 to 100 μm. is usually supported in a suitable holder.
高分子圧電膜は、たとえば金型を使用した熱セツト技術
によって波状に加工する。波の大きざやピッチ、波数は
、作用する力の大きさや膜の面積、用途などに応じて適
宜法めればよいが、通常、波高が０．１〜１ｍｍ程度、
ピッチが２〜１０ｍｍ程度になるようにする。波数は、
５程度までで十分である。また、波のピッチは等ピッチ
でも不等ピッチでもよい。用途などによっては、外側は
ど、連続的に、あるいは段階的にピッチを大きくしたほ
うがよい場合もめる。The polymeric piezoelectric film is processed into a corrugated shape, for example, by a heat setting technique using a mold. The size, pitch, and wave number of the waves may be determined as appropriate depending on the magnitude of the force acting, the area of the membrane, the purpose, etc., but usually the wave height is about 0.1 to 1 mm,
The pitch should be about 2 to 10 mm. The wave number is
Up to about 5 is sufficient. Further, the pitch of the waves may be equal pitch or uneven pitch. Depending on the application, it may be better to increase the pitch continuously or stepwise on the outside.
電極は、金、銀、銅、アルミニウムなど、電気的に良導
体である金属からなり、蒸着、スパッタリング、メッキ
などの方法によって上記膜の両面に直接形成する。
゛
作用
高分子圧電膜は、そのいずれか一方の面から力が作用す
ると変形してたわみ、力が作用しなくなると元の形に復
帰する。力は、いずれの面から作用させてもよい。しか
して、膜は、それが変形したときその変形量に応じた電
圧を発生するので、その電圧を両面の電極を介して取り
出すことにより、作用した力の大きざを知ることができ
る。変形量や復元力は、膜の厚みや、波の大きさやピッ
チなどによっても異なるが、作用した力と発生電圧との
間には相関がある。The electrodes are made of a metal that is an electrically good conductor, such as gold, silver, copper, or aluminum, and are formed directly on both surfaces of the film by a method such as vapor deposition, sputtering, or plating.
゛Work The polymer piezoelectric film deforms and bends when a force is applied to it from either side, and returns to its original shape when the force is no longer applied. The force may be applied from either side. Therefore, when the membrane is deformed, it generates a voltage corresponding to the amount of deformation, so by extracting this voltage through the electrodes on both sides, it is possible to know the magnitude of the force acting on it. Although the amount of deformation and restoring force vary depending on the thickness of the membrane and the size and pitch of the waves, there is a correlation between the applied force and the generated voltage.
実施態様
第１図および第２図において、波状の高分子圧電膜１の
両面には、電極２．３が蒸着により形成され、いわゆる
本体部分が構成されている。膜１の波は、等ピッチで同
心円を描いている。また、本体部分は、上下２枚の、薄
いリング状の金属製ホルダ４．５で挟持され、ざらに別
の、剛性を有する、金属や合成樹脂などからなる板状ホ
ルダ６上に接着により支持されている。なお、図示して
いないが、金属製ホルダ４．５に、電極２．３間に発生
する電圧を取り出すためのリード線が接続されている。Embodiment In FIGS. 1 and 2, electrodes 2.3 are formed by vapor deposition on both surfaces of a corrugated polymeric piezoelectric film 1, forming a so-called main body portion. The waves of the film 1 draw concentric circles with equal pitch. The main body portion is sandwiched between two upper and lower thin ring-shaped metal holders 4.5, and supported by adhesive on another rigid plate-shaped holder 6 made of metal, synthetic resin, etc. has been done. Although not shown, a lead wire for taking out the voltage generated between the electrodes 2.3 is connected to the metal holder 4.5.
このようなセンサは、本体部分の、第１図における上側
または下側の面に力が作用したとき、その本体部分、し
たがって膜１が変形し、電極２．３間に変形向に応じた
電圧を発生する。この電圧の大きさは、上述したように
作用した力の大きざに対応しているので、それから力の
大きさを知ることができるものである。In such a sensor, when a force is applied to the upper or lower surface of the main body in FIG. occurs. The magnitude of this voltage corresponds to the magnitude of the applied force as described above, so the magnitude of the force can be determined from it.
上記において、膜の波は、正方形を描くように形成され
ていてもよい。In the above, the waves of the film may be formed to draw a square.
また、機器などに直接取り付けて使用する場合、ホルダ
６、またはホルダ６とホルダ４．５を省略することもで
きる。Further, when the holder 6 or the holder 6 and the holder 4.5 are used by being directly attached to a device, the holder 6 or the holder 6 and the holder 4.5 can be omitted.
発明の効果
この発明の力センサは、波状で、かつ波を同心的に形成
してなる高分子圧電膜を使用しているから、作用する力
が小さくても膜が大きく変形し、大きな電圧が得られる
。そのため、感度が大きく向上する。しかも、上述した
従来のセンサのように力の方向に制限がなく、いずれの
面に力が作用してもよいし、塑性変形も起こしにくい。Effects of the Invention The force sensor of this invention uses a polymeric piezoelectric film that is wavy and has concentric waves, so even if the applied force is small, the film deforms greatly and a large voltage is generated. can get. Therefore, sensitivity is greatly improved. Furthermore, unlike the conventional sensor described above, there is no restriction on the direction of the force, the force may act on any surface, and plastic deformation is unlikely to occur.
そのため、用途が拡がる。This expands the range of uses.
この発明の力センサは、上述したような特長から、いろ
いろな用途に使用することができる。たとえば、気体や
液体の、差圧計、圧力計、外圧式あるいはカルマン渦式
の流量計、異常圧力警報器、圧力調整器などに使用する
ことができる。また、キーボードのスイッチや、マイク
ロホンなどに使用することができる。The force sensor of the present invention can be used for various purposes due to the above-mentioned features. For example, it can be used for gas or liquid differential pressure gauges, pressure gauges, external pressure type or Karman vortex type flow meters, abnormal pressure alarms, pressure regulators, etc. It can also be used for keyboard switches, microphones, etc.
第１図および第２図は、この発明の力センサの一実施態
様を示す概略図で、第１図は縦断面図、第２図は平面図
である。
１：高分子圧電膜
２：電極
３：電極
４：ホルダ
５：ホルダ
６：ホルダ1 and 2 are schematic diagrams showing one embodiment of the force sensor of the present invention, with FIG. 1 being a longitudinal sectional view and FIG. 2 being a plan view. 1: Polymer piezoelectric film 2: Electrode 3: Electrode 4: Holder 5: Holder 6: Holder
Claims (1)
の両面に電極を形成してなる力センサ。A force sensor that has electrodes formed on both sides of a polymer piezoelectric film that is wavy and has concentric waves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15970586A JPS6316237A (en) | 1986-07-09 | 1986-07-09 | Force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15970586A JPS6316237A (en) | 1986-07-09 | 1986-07-09 | Force sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6316237A true JPS6316237A (en) | 1988-01-23 |
Family
ID=15699502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15970586A Pending JPS6316237A (en) | 1986-07-09 | 1986-07-09 | Force sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316237A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10368799B2 (en) | 2015-01-27 | 2019-08-06 | Apple Inc. | System for determining the quality of sleep |
| US10512432B2 (en) | 2016-08-12 | 2019-12-24 | Apple Inc. | Vital signs monitoring system |
| US11349063B2 (en) | 2017-05-22 | 2022-05-31 | Apple Inc. | Multi-element piezo sensor for in-bed physiological measurements |
-
1986
- 1986-07-09 JP JP15970586A patent/JPS6316237A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10368799B2 (en) | 2015-01-27 | 2019-08-06 | Apple Inc. | System for determining the quality of sleep |
| US10512432B2 (en) | 2016-08-12 | 2019-12-24 | Apple Inc. | Vital signs monitoring system |
| US11375957B2 (en) | 2016-08-12 | 2022-07-05 | Apple Inc. | Vital signs monitoring system |
| US11918381B2 (en) | 2016-08-12 | 2024-03-05 | Apple Inc. | Vital signs monitoring system |
| US11349063B2 (en) | 2017-05-22 | 2022-05-31 | Apple Inc. | Multi-element piezo sensor for in-bed physiological measurements |
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