JPS631620U - - Google Patents
Info
- Publication number
- JPS631620U JPS631620U JP9631686U JP9631686U JPS631620U JP S631620 U JPS631620 U JP S631620U JP 9631686 U JP9631686 U JP 9631686U JP 9631686 U JP9631686 U JP 9631686U JP S631620 U JPS631620 U JP S631620U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- wet type
- tip
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 239000003513 alkali Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986096316U JPH044813Y2 (enrdf_load_stackoverflow) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986096316U JPH044813Y2 (enrdf_load_stackoverflow) | 1986-06-24 | 1986-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631620U true JPS631620U (enrdf_load_stackoverflow) | 1988-01-07 |
| JPH044813Y2 JPH044813Y2 (enrdf_load_stackoverflow) | 1992-02-12 |
Family
ID=30961918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986096316U Expired JPH044813Y2 (enrdf_load_stackoverflow) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044813Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008205090A (ja) * | 2007-02-19 | 2008-09-04 | Taiyo Nippon Sanso Corp | 気相成長装置 |
| US7553356B2 (en) | 2004-10-12 | 2009-06-30 | Sumco Corporation | Exhaust gas scrubber for epitaxial wafer manufacturing device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916544U (enrdf_load_stackoverflow) * | 1972-05-19 | 1974-02-12 |
-
1986
- 1986-06-24 JP JP1986096316U patent/JPH044813Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916544U (enrdf_load_stackoverflow) * | 1972-05-19 | 1974-02-12 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7553356B2 (en) | 2004-10-12 | 2009-06-30 | Sumco Corporation | Exhaust gas scrubber for epitaxial wafer manufacturing device |
| JP2008205090A (ja) * | 2007-02-19 | 2008-09-04 | Taiyo Nippon Sanso Corp | 気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044813Y2 (enrdf_load_stackoverflow) | 1992-02-12 |