JPS63161307U - - Google Patents

Info

Publication number
JPS63161307U
JPS63161307U JP5403687U JP5403687U JPS63161307U JP S63161307 U JPS63161307 U JP S63161307U JP 5403687 U JP5403687 U JP 5403687U JP 5403687 U JP5403687 U JP 5403687U JP S63161307 U JPS63161307 U JP S63161307U
Authority
JP
Japan
Prior art keywords
light
monochromator
concave
concave surface
passes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5403687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438246Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5403687U priority Critical patent/JPH0438246Y2/ja
Publication of JPS63161307U publication Critical patent/JPS63161307U/ja
Application granted granted Critical
Publication of JPH0438246Y2 publication Critical patent/JPH0438246Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP5403687U 1987-04-09 1987-04-09 Expired JPH0438246Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5403687U JPH0438246Y2 (cs) 1987-04-09 1987-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5403687U JPH0438246Y2 (cs) 1987-04-09 1987-04-09

Publications (2)

Publication Number Publication Date
JPS63161307U true JPS63161307U (cs) 1988-10-21
JPH0438246Y2 JPH0438246Y2 (cs) 1992-09-08

Family

ID=30880653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5403687U Expired JPH0438246Y2 (cs) 1987-04-09 1987-04-09

Country Status (1)

Country Link
JP (1) JPH0438246Y2 (cs)

Also Published As

Publication number Publication date
JPH0438246Y2 (cs) 1992-09-08

Similar Documents

Publication Publication Date Title
JPH05126523A (ja) 遠隔距離測定装置
JPS63161307U (cs)
KR19980081410A (ko) 물체의 형태를 비접촉식으로 측정하는 방법 및 장치
EP0890822A3 (en) A triangulation method and system for color-coded optical profilometry
JPS62189889U (cs)
JPH01144809U (cs)
JPH01133759U (cs)
JPS63126812U (cs)
JPS6427628U (cs)
JPS6222530U (cs)
JPH03117749U (cs)
JPH0163163U (cs)
JPH022686U (cs)
JPH0416344U (cs)
JPS63193316U (cs)
JPH0316630U (cs)
JPS60152915U (ja) 光導波形変位センサ
JPS5940593A (ja) 半導体レ−ザ装置
JPH0380943U (cs)
JPH0267212U (cs)
JPS645107U (cs)
JPH03100819U (cs)
JPS63185517U (cs)
JPS6237709U (cs)
JPS645108U (cs)