JPS63161151A - Method for conveying material to be heated in blackening treatment - Google Patents

Method for conveying material to be heated in blackening treatment

Info

Publication number
JPS63161151A
JPS63161151A JP31062386A JP31062386A JPS63161151A JP S63161151 A JPS63161151 A JP S63161151A JP 31062386 A JP31062386 A JP 31062386A JP 31062386 A JP31062386 A JP 31062386A JP S63161151 A JPS63161151 A JP S63161151A
Authority
JP
Japan
Prior art keywords
blackening
furnace
masks
heated
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31062386A
Other languages
Japanese (ja)
Other versions
JPH0463150B2 (en
Inventor
Hisao Inoue
久雄 井上
Takashi Ono
隆司 小野
Takashi Ishimoto
崇 石本
Toshitomo Hayamizu
速水 敏友
Fumio Shibata
文男 柴田
Katsumi Iguchi
勝己 井口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Toshiba Corp
Original Assignee
Daido Steel Co Ltd
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd, Toshiba Corp filed Critical Daido Steel Co Ltd
Priority to JP31062386A priority Critical patent/JPS63161151A/en
Publication of JPS63161151A publication Critical patent/JPS63161151A/en
Publication of JPH0463150B2 publication Critical patent/JPH0463150B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

PURPOSE:To form dense blackening films on the surfaces of shadow masks for cathode ray tubes by stacking the shadow masks spaced from each other on a metal frame and passing the masks through the inside of a blackening furnace having opening/ closing doors on inlet and outlet sides. CONSTITUTION:The many shadow masks A parted from each other at specified intervals are stack on the metal frame 81 and after the frame is placed on a charging table 25, the frame is put into a front chamber 23. After the atmospheric gas for blackening from a gas generator 61 is introduced into the chamber 23 by opening a valve 52, the door 41 is opened and the frame is introduced into a heating and holding furnace 21. The atmospheric gas for blackening is filled by a valve 51 in the chamber 21 and the masks are heated to about 580 deg.C in the atmosphere, by which the blackening films essentially consisting of Fe3O4 are formed on the surfaces. The masks are in succession thereof cooled down to about 100 deg.C in a cooling zone 22. The masks are passed through a rear chamber 24 in which the atmospheric gas for blackening is filled through a valve 63 and thereafter, the frame 81 is taken to the outside of the blackening furnace. The blackening treatment of the many shadow masks at one time is thus permitted.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、黒化炉を用いてブラウン管用シャドウマスク
、そのサポートフレーム、更にはインチシールドの如き
被熱材を炉内搬送しつつ黒化処理する際の、該被熱材の
搬送方法に関する。
[Detailed Description of the Invention] <Industrial Application Field> The present invention uses a blackening furnace to blacken heat-receiving materials such as a shadow mask for a cathode ray tube, its support frame, and even an inch shield while conveying them through the furnace. The present invention relates to a method for transporting the heated material during processing.

シャドウマスク形カラーテレビや0AIa器デイスプレ
ーのブラウン管には、パネルとファンネルとの間にサポ
ートフレームに溶接させたシャドウマスクが組込まれて
いる。そしてこの種のシャドウマスクは、電子ビームの
乱反射、シャドウマスクのドーミング、赤錆の発生等の
防止を目的として、サポートフレームやインナシールド
も含めその表面に黒化膜(Fe30a を主とする酸化
膜)を形成させたものが使用されている。
A shadow mask type color television or a cathode ray tube of an OAIa display has a shadow mask welded to a support frame between the panel and the funnel. This type of shadow mask has a blackened film (an oxide film mainly made of Fe30a) on its surface, including the support frame and inner shield, for the purpose of preventing diffuse reflection of the electron beam, doming of the shadow mask, and occurrence of red rust. is used.

ところで、シャドウマスクやそのサポートフレーム等の
被熱材表面へ黒化膜を形成させる際に利用される連続式
の黒化炉では、被熱材を炉内搬送しつつ、COやC02
を含む雰囲気ガス下に、シャドウマスクやそのサポート
フレーム等を580℃前後で加熱・均熱処理し、引続き
100℃程度まで冷却処理しているが、かかる連続黒化
処理において被熱材の搬送方法には、被熱材の表面に所
定膜厚の緻密な黒化膜を作業性良く経済的に安定して形
成させ得ることが要請される。
By the way, in a continuous blackening furnace used to form a blackening film on the surface of a heat target material such as a shadow mask or its support frame, CO and CO2 are removed while the heat target material is transported through the furnace.
The shadow mask and its support frame are heated and soaked at around 580°C under an atmospheric gas containing It is required that a dense blackened film of a predetermined thickness can be formed on the surface of a heated material with good workability and economical stability.

本発明はかかる要請に応える゛被熱材の搬送方法に関す
るものである。
The present invention relates to a method for conveying a heated material to meet such demands.

〈従来の技術、その問題点〉 従来、シャドウマスクやそのサポートフレーム等の被熱
材表面へ黒化膜を形成させる際に利用される連続式の黒
化炉では、被熱材の搬送方法として、メツシュベルトの
コンベヤによる搬送が行なわれている。これは、炉内と
炉外とを無端で回転するメツシュベルト上に被熱材を載
置して搬送する方法であり、この状態で被熱材を炉内搬
送しつつ、1.5〜2.0%程度のCOを含む発熱形ガ
ス雰囲気下に580℃前後で加熱・均熱処理し、引続き
100℃程度まで冷却処理して、該被熱材の表面に黒化
膜を形成させるのである。
<Conventional technology and its problems> Conventionally, in a continuous blackening furnace used to form a blackening film on the surface of a heat target material such as a shadow mask or its support frame, the method of conveying the heat target material is , transportation is carried out by a meshbelt conveyor. This is a method in which the material to be heated is placed on a mesh belt that rotates endlessly between the inside and outside of the furnace. The material is heated and soaked at about 580° C. in an exothermic gas atmosphere containing about 0% CO, and then cooled to about 100° C. to form a blackened film on the surface of the heated material.

ところが、上記従来法には、次のような種々の問題点が
ある。
However, the above conventional method has various problems as follows.

1)メツシュベルト上へ例えばシャドウマスクを重なら
ないように1枚づつ載置し、黒化処理後にまたそれらを
1枚づつ取出さなければならないため、作業性及び生産
性が悪過ぎる。メツシュベルト上へシャドウマスクを重
ねて積載すると、重なり合っている部分に黒化膜が形成
され難く、そのため該部分で赤錆発生等の不都合を引き
起こし、逆に重なり合っている部分へ充分な黒化膜を形
成させようとすると、重なり合っていない部分に形成さ
れる黒化膜の膜厚が厚くなり過ぎて、そのような黒化膜
は剥離し易く、またそのような黒化膜はシャドウマスク
をパネルとファンネルとの間へ組込む際に溶接不良を引
き起こす。そこで、作業性の悪さを我慢して、シャドウ
マスクを上記のように1枚づつ取扱っているのが実情な
のである。
1) For example, shadow masks must be placed one by one on the mesh belt so that they do not overlap, and then taken out one by one after the blackening process, resulting in poor workability and productivity. When shadow masks are stacked on top of each other on the mesh belt, it is difficult to form a black film on the overlapping parts, which causes problems such as red rust, and conversely, a sufficient black film is formed on the overlapping parts. If you try to do so, the thickness of the blackened film formed on the non-overlapping parts will become too thick, and such a blackened film will easily peel off. This causes welding defects when assembling between the Therefore, the reality is that shadow masks are handled one by one as described above, putting up with the poor workability.

そして、かかる作業性の悪さは、黒化処理に先立ってシ
ャドウマスクを洗浄処理する際も同様に問題となる。
Such poor workability also poses a problem when the shadow mask is cleaned prior to the blackening process.

2)炉内と炉外とを無端で回転するメツシュベルトを用
いるため、該メツシュベルトは炉内での加熱と炉外での
冷却とを繰返すこととなり、これによる熱エネルギの無
駄が大きい。
2) Since a mesh belt that rotates endlessly between the inside and outside of the furnace is used, the mesh belt is repeatedly heated inside the furnace and cooled outside the furnace, resulting in a large waste of thermal energy.

3)上記のようなメツシュベルトを用いる関係で黒化炉
の装入側と装出側は開放になっており、それらを横置き
煙道状に絞り込んでも、該開放部分からの漏出があるた
めに雰囲気ガスを多量に必要とする。
3) Due to the use of mesh belts as described above, the charging and discharging sides of the blackening furnace are open, and even if they are placed horizontally and narrowed into a flue, there will be leakage from the open parts. Requires a large amount of atmospheric gas.

〈発明が解決しようとする問題点、その解決手段〉 本発明は、叙上の如き従来の問題点を解決して、前述し
た要請に応える、改良された搬送方法を提供するもので
ある。
<Problems to be Solved by the Invention and Means for Solving the Problems> The present invention solves the conventional problems as described above and provides an improved conveyance method that meets the above-mentioned demands.

しかして木発、明は。However, the Ming Dynasty was born on wood.

黒化炉を用いてブラウン管用シャドウマスクやそのサポ
ートフレーム等の被熱材を炉内搬送しつつ表面黒化膜形
成処理するに際し、炉内雰囲気が開閉可能な扉で遮断さ
れ得る黒化炉内を、上下で所定間隔を空けて多段に被熱
材を積載した金枠をローラコンベヤで支持しつつ搬送す
ることを特徴とする黒化膜形成処理における被熱材の搬
送方法に係る。
When using a blackening furnace to form a blackening film on the surface of materials to be heated, such as cathode ray tube shadow masks and their support frames, while transporting them through the furnace, the inside of the blackening furnace is where the atmosphere inside the furnace can be shut off by a door that can be opened and closed. The present invention relates to a method for transporting heat-target materials in a blackening film forming process, characterized in that a metal frame loaded with heat-target materials in multiple stages at predetermined intervals above and below is transported while being supported by a roller conveyor.

本発明において肝要な点は、シャドウマスクやそのサポ
ートフレーム等の被熱材の表面に所定膜厚の緻密な黒化
膜を作業性良く経済的に形成させるために、金枠内へ例
えばシャドウマスクを上下で所定間隔を空けて多段に積
載し、開閉可能な扉で遮断された炉内雰囲気中、該金枠
をローラコンベヤで搬送する処にある。
An important point in the present invention is that in order to form a dense blackened film of a predetermined thickness on the surface of heat-receiving materials such as a shadow mask and its support frame with good workability and economically, The metal frames are stacked in multiple stages at predetermined intervals above and below, and the metal frames are conveyed by a roller conveyor in the furnace atmosphere, which is shut off by a door that can be opened and closed.

以下1図面に基いて本発明の構成を更に詳細に説明する
The configuration of the present invention will be explained in more detail below based on one drawing.

〈実施例〉 第1図は本発明の一実施状態を示す全体正面図第2図は
その部分拡大側面図である。加熱・均熱帯21と冷却帯
22とを備える黒化炉本体11には、その装入側に駆動
装置31で開閉可能な扉41が、またその装出側に駆動
装置32で開閉可能な扉42がそれぞれ装備されている
。黒化炉本体11にバルブ51を介してガス発生装置6
1からの発熱形ガスが導入され、これによる炉内雰囲気
が扉41.42で遮断される構成である。該黒化炉本体
11の装入側には扉41を介して前室23が、また装出
側には扉42を介しそ後室24がそれぞれ連結されてい
て、前室23及び後室24の各室内雰囲気はバルブ52
.53を介して導入される発熱形ガスで置換されるよう
になっており、前室23の更に装入側には駆動装置33
で開閉可能な扉43を介して装入テーブル25が、また
後室24の更に装出側には駆動装置34で開閉可能な扉
44を介して装出テーブル26がそれぞれ付設されてい
る。そして、装入テーブル25〜前室23〜黒化炉本体
11(加熱中均熱帯21〜冷却帯22)〜後室24〜装
出テーブル26に亙ってローラコンベヤ71が装備され
ている。
<Embodiment> FIG. 1 is an overall front view showing one embodiment of the present invention, and FIG. 2 is a partially enlarged side view thereof. The blackening furnace body 11, which includes a heating/soaking zone 21 and a cooling zone 22, has a door 41 on its charging side that can be opened and closed by a drive device 31, and a door that can be opened and closed by a drive device 32 on its discharge side. 42 are each equipped. A gas generator 6 is connected to the blackening furnace body 11 via a valve 51.
The exothermic gas from No. 1 is introduced, and the atmosphere inside the furnace due to this is shut off by doors 41 and 42. A front chamber 23 is connected to the charging side of the blackening furnace body 11 through a door 41, and a rear chamber 24 is connected to the charging side through a door 42. The atmosphere in each room is controlled by valve 52.
.. 53, and a drive device 33 is provided on the charging side of the front chamber 23.
A loading table 25 is attached to the rear chamber 24 via a door 43 which can be opened and closed by a drive device 34, and a loading table 26 is attached to the loading side of the rear chamber 24 via a door 44 which can be opened and closed by a drive device 34. A roller conveyor 71 is provided extending from the charging table 25 to the front chamber 23 to the blackening furnace main body 11 (heating/soaking zone 21 to cooling zone 22) to the rear chamber 24 to the loading table 26.

図面では、金枠81の円内側へ突設された短尺の受片8
2へ処理対象であるシャドウマスクAを上下に所定間隔
を空けて多段に積載し、該金枠81をローラコンベヤ7
1に載置して、装入テーブル25→前室23→黒化炉本
体11(加熱・均熱帯21→冷却帯22)→後室24→
装出テーブル26の順で搬送している状態を示している
が、この実施状態を、材質がアルミギルド鋼であるシャ
ドウマスクの場合を例に挙げてより具体的に説明すると
、次の通りである。
In the drawing, a short receiving piece 8 protrudes toward the inner side of the metal frame 81.
2, the shadow masks A to be processed are stacked vertically at predetermined intervals in multiple stages, and the metal frame 81 is transferred to the roller conveyor 7.
1, charging table 25 → front chamber 23 → blackening furnace main body 11 (heating/soaking zone 21 → cooling zone 22) → rear chamber 24 →
Although the state is shown in which the loading table 26 is being transported in this order, this implementation state will be explained in more detail using the case of a shadow mask whose material is aluminum guild steel as an example. be.

先ず、第2図で例示するように、シャドウマスクAを上
下で所定間隔を空けて金枠81へ多段に積載する。そし
て該金枠81をローラコンベヤ71上へ載置し、装入テ
ーブル25から前室23へと装入して、扉43を閉じる
。前室23内をバルブ52を介して導入する発熱形ガス
で置換した後、扉41を開き、金枠81を黒化炉本体1
1へと装入して、扉41を閉じる。黒化炉本体ll内に
おいて、金枠81に積載されたシャドウマスクAをロー
ラコンベヤ71で炉内搬送しつつ、バルブ51を介して
導入する発熱形ガス雰囲気下に、加熱・均熱帯21で5
80℃前後に熱処理し、引き続き冷却帯22で100℃
程度まで冷却する。冷却後、予め後室24内をバルブ5
3を介して導入する発熱形ガスで置換しておいてから、
扉42を開き、金枠81を該後室24へと装入して、扉
42を閉じる。最後に、扉44を開き、金枠81を装出
テーブル26へと抽出して、扉44を閉じる、以下、上
記操作の連続する繰返しである。説明を省略するが、シ
ャドウマスクの材質との関係で、加熱・均熱帯へ発熱形
ガスに加えて例えばスチームを導入し、また冷却帯へ発
熱形ガスに加えて例えば空気を導入することもできる。
First, as illustrated in FIG. 2, the shadow masks A are stacked in multiple stages on the metal frame 81 with predetermined intervals above and below. Then, the metal frame 81 is placed on the roller conveyor 71, loaded from the loading table 25 into the front chamber 23, and the door 43 is closed. After replacing the inside of the front chamber 23 with exothermic gas introduced through the valve 52, the door 41 is opened and the metal frame 81 is inserted into the blackening furnace main body 1.
1 and close the door 41. In the blackening furnace main body 11, the shadow mask A loaded on the metal frame 81 is transported inside the furnace by the roller conveyor 71, and is heated in the heating/soaking zone 21 under an exothermic gas atmosphere introduced through the valve 51.
Heat treated to around 80℃, then heated to 100℃ in cooling zone 22
Cool to a certain degree. After cooling, the inside of the rear chamber 24 is sealed with the valve 5.
After replacing the gas with exothermic gas introduced through 3,
The door 42 is opened, the metal frame 81 is inserted into the rear chamber 24, and the door 42 is closed. Finally, the door 44 is opened, the metal frame 81 is extracted to the loading table 26, and the door 44 is closed. Hereinafter, the above-mentioned operation is continuously repeated. Although the explanation will be omitted, depending on the material of the shadow mask, it is also possible to introduce steam, for example, in addition to the exothermic gas into the heating/soaking zone, and to introduce air, in addition to the exothermic gas, into the cooling zone. .

く発朋の効果〉 既に明らかなように、以上説明した本発明には次のよう
な優れた効果がある。
Advantageous Effects> As is already clear, the present invention described above has the following excellent effects.

(1)金枠内へ被熱材を積載し、まとめて取扱うため、
作業性及び生産性が良い、そして、かかる作業性の良さ
は、黒化処理に先立って行なわれる洗浄処理においても
同様に発揮される。
(1) In order to load the heated materials into the metal frame and handle them all at once,
Workability and productivity are good, and such good workability is similarly exhibited in the cleaning treatment performed prior to the blackening treatment.

(2)被熱材を金枠でまとめて取扱い、しかも該金枠を
搬送するローラコンベヤは炉内において常時同じ温度条
件下に置かれるため、炉内と炉外とを無端で回転して加
熱と冷却とを繰返すメツシュベルトで被熱材を1個づつ
搬送する場合に比べて、単位処理量当りの熱エネルギの
無駄が少ない。
(2) The materials to be heated are handled together in a metal frame, and the roller conveyor that conveys the metal frame is always kept under the same temperature conditions inside the furnace, so it endlessly rotates inside and outside the furnace to heat it. Compared to the case where heated materials are conveyed one by one using a mesh belt that repeatedly performs cooling and cooling, there is less waste of thermal energy per unit processing amount.

(3)被熱材をまとめて取扱う金枠をローラコンベヤで
搬送し、黒化炉本体の炉内をその装入側と装出側に装備
した扉で遮断するため、必要な雰囲気ガスが少なくてよ
い。
(3) The metal frame that handles the materials to be heated is transported by a roller conveyor, and the inside of the blackening furnace is isolated by doors installed on the charging and unloading sides, so less atmospheric gas is required. It's fine.

(4)金枠内に積載された被熱材は上下で所定間隔が空
けられており、しかも炉内雰囲気は遮断されていてその
乱れがないため、各被熱材の全表面に亙って所定膜厚の
緻密な黒化膜を形成させることができる。
(4) The materials to be heated loaded in the metal frame are spaced apart from each other by a predetermined distance above and below, and the atmosphere inside the furnace is blocked and there is no disturbance, so the entire surface of each material to be heated is covered. A dense blackened film with a predetermined thickness can be formed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施状態を示す全体正面図第2図は
その部分拡大側面図である。 11・・黒化炉本体、21・・加熱・均熱帯22・・冷
却帯、23・O前室、24・拳後室25・・装入テーブ
ル、26・・装出テーブル31〜34−・駆動装置、4
1〜44・・扉51〜53拳・バルブ、61拳・ガス発
生装置71・・ローラコンベヤ、81舎・金枠A 11
11シヤドウマスク 特許出願人 大同特殊鋼株式会社 株式会社 東 芝
FIG. 1 is an overall front view showing one embodiment of the present invention, and FIG. 2 is a partially enlarged side view thereof. 11. Blackening furnace main body, 21. Heating/soaking zone 22. Cooling zone, 23. O front chamber, 24. Rear chamber 25. Charging table, 26. Loading table 31-34. Drive device, 4
1-44... Doors 51-53 - Valve, 61 - Gas generator 71... Roller conveyor, 81 - Metal frame A 11
11 Shadow mask patent applicant Daido Steel Co., Ltd. Toshiba Corporation

Claims (1)

【特許請求の範囲】[Claims] 1、黒化炉を用いてブラウン管用シャドウマスクやその
サポートフレーム等の被熱材を炉内搬送しつつ表面黒化
膜形成処理するに際し、炉内雰囲気が開閉可能な扉で遮
断され得る黒化炉内を、上下で所定間隔を空けて多段に
被熱材を積載した金枠をローラコンベヤで支持しつつ搬
送することを特徴とする黒化処理における被熱材の搬送
方法。
1. When using a blackening furnace to form a blackening film on the surface of heated materials such as cathode ray tube shadow masks and their support frames while transporting them through the furnace, the atmosphere inside the furnace may be blocked by a door that can be opened and closed. A method for transporting materials to be heated in blackening treatment, which comprises transporting a metal frame loaded with materials to be heated in multiple stages at predetermined intervals above and below in a furnace while being supported by a roller conveyor.
JP31062386A 1986-12-24 1986-12-24 Method for conveying material to be heated in blackening treatment Granted JPS63161151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31062386A JPS63161151A (en) 1986-12-24 1986-12-24 Method for conveying material to be heated in blackening treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31062386A JPS63161151A (en) 1986-12-24 1986-12-24 Method for conveying material to be heated in blackening treatment

Publications (2)

Publication Number Publication Date
JPS63161151A true JPS63161151A (en) 1988-07-04
JPH0463150B2 JPH0463150B2 (en) 1992-10-08

Family

ID=18007487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31062386A Granted JPS63161151A (en) 1986-12-24 1986-12-24 Method for conveying material to be heated in blackening treatment

Country Status (1)

Country Link
JP (1) JPS63161151A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125267A (en) * 1979-03-22 1980-09-26 Kawasaki Heavy Ind Ltd Surface treating method of improving abrasion resistance and corrosion resistance of iron and steel
JPS5728725A (en) * 1980-07-11 1982-02-16 Dainippon Printing Co Ltd Packing vessel and its manufacture and its use
JPS5995152U (en) * 1982-12-15 1984-06-28 トヨタ自動車株式会社 heat treatment jig

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125267A (en) * 1979-03-22 1980-09-26 Kawasaki Heavy Ind Ltd Surface treating method of improving abrasion resistance and corrosion resistance of iron and steel
JPS5728725A (en) * 1980-07-11 1982-02-16 Dainippon Printing Co Ltd Packing vessel and its manufacture and its use
JPS5995152U (en) * 1982-12-15 1984-06-28 トヨタ自動車株式会社 heat treatment jig

Also Published As

Publication number Publication date
JPH0463150B2 (en) 1992-10-08

Similar Documents

Publication Publication Date Title
JP2590182B2 (en) Blackening furnace and method of manufacturing shadow mask using this blackening furnace
WO2020218341A1 (en) Pyrolysis apparatus
US7625260B2 (en) Method of sealing glass panel assembly and sealing process furnace
US4859251A (en) Furnace for formation of black oxide film on the surface of thin metal sheet and method for formation of black oxide film on the surface of shadow mask material by use of said furnace
JPS63161151A (en) Method for conveying material to be heated in blackening treatment
JPS63162851A (en) Blackening furnace
JP4431743B2 (en) Heat treatment equipment
JPS63161152A (en) Blackening furnace
JPS60190511A (en) Heat treating installation for metal
JP3547700B2 (en) Continuous vacuum carburizing furnace
JP7361169B2 (en) Continuous heating furnace
JP2843471B2 (en) Airtight structure of partition door in vacuum processing furnace
JPS62290858A (en) Heat treating furnace
JP4419160B2 (en) Protecting method of atmosphere in heating furnace and atmosphere heating furnace
JPH0760064B2 (en) Operating method of oxide film formation treatment furnace
JPS61290724A (en) Method and apparatus for treating wafer
JPH03207811A (en) Vacuum furnace
JPH0446360Y2 (en)
JPH0196326A (en) Fluidized bed heat-treatment apparatus
JPS6345326A (en) Heat treatment furnace for coil
KR960007240B1 (en) Shadow mask of crt
JP2003253421A (en) Blackening furnace
JPS6354572A (en) Continuous treater for refrigeration treatment, etc. of article
JPH0649536A (en) Hydrogen atmosphere heat treating furnace for metallic strip coil
JPH04165294A (en) Replacing method for gas in chamber

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees