JPS63159835U - - Google Patents

Info

Publication number
JPS63159835U
JPS63159835U JP5256387U JP5256387U JPS63159835U JP S63159835 U JPS63159835 U JP S63159835U JP 5256387 U JP5256387 U JP 5256387U JP 5256387 U JP5256387 U JP 5256387U JP S63159835 U JPS63159835 U JP S63159835U
Authority
JP
Japan
Prior art keywords
wafer
cassette
contact portion
transport
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5256387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5256387U priority Critical patent/JPS63159835U/ja
Publication of JPS63159835U publication Critical patent/JPS63159835U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5256387U 1987-04-06 1987-04-06 Pending JPS63159835U (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5256387U JPS63159835U (US06368395-20020409-C00050.png) 1987-04-06 1987-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5256387U JPS63159835U (US06368395-20020409-C00050.png) 1987-04-06 1987-04-06

Publications (1)

Publication Number Publication Date
JPS63159835U true JPS63159835U (US06368395-20020409-C00050.png) 1988-10-19

Family

ID=30877841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5256387U Pending JPS63159835U (US06368395-20020409-C00050.png) 1987-04-06 1987-04-06

Country Status (1)

Country Link
JP (1) JPS63159835U (US06368395-20020409-C00050.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009022589A1 (ja) * 2007-08-13 2009-02-19 Hirata Corporation 自動倉庫システム及びその容器移載方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009022589A1 (ja) * 2007-08-13 2009-02-19 Hirata Corporation 自動倉庫システム及びその容器移載方法

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