JPS63159828U - - Google Patents
Info
- Publication number
- JPS63159828U JPS63159828U JP5290187U JP5290187U JPS63159828U JP S63159828 U JPS63159828 U JP S63159828U JP 5290187 U JP5290187 U JP 5290187U JP 5290187 U JP5290187 U JP 5290187U JP S63159828 U JPS63159828 U JP S63159828U
- Authority
- JP
- Japan
- Prior art keywords
- wafer holder
- wafer
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5290187U JPS63159828U (zh) | 1987-04-07 | 1987-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5290187U JPS63159828U (zh) | 1987-04-07 | 1987-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159828U true JPS63159828U (zh) | 1988-10-19 |
Family
ID=30878490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5290187U Pending JPS63159828U (zh) | 1987-04-07 | 1987-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159828U (zh) |
-
1987
- 1987-04-07 JP JP5290187U patent/JPS63159828U/ja active Pending