JPS63159822U - - Google Patents
Info
- Publication number
- JPS63159822U JPS63159822U JP5362487U JP5362487U JPS63159822U JP S63159822 U JPS63159822 U JP S63159822U JP 5362487 U JP5362487 U JP 5362487U JP 5362487 U JP5362487 U JP 5362487U JP S63159822 U JPS63159822 U JP S63159822U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding plate
- holding
- stopper
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5362487U JPS63159822U (enExample) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5362487U JPS63159822U (enExample) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159822U true JPS63159822U (enExample) | 1988-10-19 |
Family
ID=30879862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5362487U Pending JPS63159822U (enExample) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159822U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006114598A (ja) * | 2004-10-13 | 2006-04-27 | Tsubaki Seiko:Kk | テープ接着装置およびテープ接着方法 |
-
1987
- 1987-04-08 JP JP5362487U patent/JPS63159822U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006114598A (ja) * | 2004-10-13 | 2006-04-27 | Tsubaki Seiko:Kk | テープ接着装置およびテープ接着方法 |