JPS63159755U - - Google Patents
Info
- Publication number
- JPS63159755U JPS63159755U JP5197887U JP5197887U JPS63159755U JP S63159755 U JPS63159755 U JP S63159755U JP 5197887 U JP5197887 U JP 5197887U JP 5197887 U JP5197887 U JP 5197887U JP S63159755 U JPS63159755 U JP S63159755U
- Authority
- JP
- Japan
- Prior art keywords
- vaporization
- wall surface
- sample
- vaporization chamber
- outer shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008016 vaporization Effects 0.000 claims description 6
- 238000009834 vaporization Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001637 plasma atomic emission spectroscopy Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5197887U JPS63159755U (OSRAM) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5197887U JPS63159755U (OSRAM) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159755U true JPS63159755U (OSRAM) | 1988-10-19 |
Family
ID=30876739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5197887U Pending JPS63159755U (OSRAM) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159755U (OSRAM) |
-
1987
- 1987-04-06 JP JP5197887U patent/JPS63159755U/ja active Pending
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