JPS63158771U - - Google Patents
Info
- Publication number
- JPS63158771U JPS63158771U JP5101987U JP5101987U JPS63158771U JP S63158771 U JPS63158771 U JP S63158771U JP 5101987 U JP5101987 U JP 5101987U JP 5101987 U JP5101987 U JP 5101987U JP S63158771 U JPS63158771 U JP S63158771U
- Authority
- JP
- Japan
- Prior art keywords
- pressure reducing
- reducing valve
- cap
- main body
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003566 sealing material Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Multiple-Way Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5101987U JPH0437723Y2 (ja�@�@) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5101987U JPH0437723Y2 (ja�@�@) | 1987-04-06 | 1987-04-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63158771U true JPS63158771U (ja�@�@) | 1988-10-18 |
| JPH0437723Y2 JPH0437723Y2 (ja�@�@) | 1992-09-04 |
Family
ID=30874906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5101987U Expired JPH0437723Y2 (ja�@�@) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437723Y2 (ja�@�@) |
-
1987
- 1987-04-06 JP JP5101987U patent/JPH0437723Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437723Y2 (ja�@�@) | 1992-09-04 |