JPS63157636U - - Google Patents
Info
- Publication number
- JPS63157636U JPS63157636U JP5148587U JP5148587U JPS63157636U JP S63157636 U JPS63157636 U JP S63157636U JP 5148587 U JP5148587 U JP 5148587U JP 5148587 U JP5148587 U JP 5148587U JP S63157636 U JPS63157636 U JP S63157636U
- Authority
- JP
- Japan
- Prior art keywords
- capsule
- ptp
- exhaust hood
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002775 capsule Substances 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 4
- 238000000149 argon plasma sintering Methods 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 claims 3
- 230000007547 defect Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 3
- 239000007787 solid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5148587U JPH0425632Y2 (cg-RX-API-DMAC7.html) | 1987-04-03 | 1987-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5148587U JPH0425632Y2 (cg-RX-API-DMAC7.html) | 1987-04-03 | 1987-04-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63157636U true JPS63157636U (cg-RX-API-DMAC7.html) | 1988-10-17 |
| JPH0425632Y2 JPH0425632Y2 (cg-RX-API-DMAC7.html) | 1992-06-19 |
Family
ID=30875792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5148587U Expired JPH0425632Y2 (cg-RX-API-DMAC7.html) | 1987-04-03 | 1987-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425632Y2 (cg-RX-API-DMAC7.html) |
-
1987
- 1987-04-03 JP JP5148587U patent/JPH0425632Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425632Y2 (cg-RX-API-DMAC7.html) | 1992-06-19 |
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