JPS63157030A - Probe for leak test - Google Patents

Probe for leak test

Info

Publication number
JPS63157030A
JPS63157030A JP30373286A JP30373286A JPS63157030A JP S63157030 A JPS63157030 A JP S63157030A JP 30373286 A JP30373286 A JP 30373286A JP 30373286 A JP30373286 A JP 30373286A JP S63157030 A JPS63157030 A JP S63157030A
Authority
JP
Japan
Prior art keywords
gas
joined part
helium
gaseous
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30373286A
Other languages
Japanese (ja)
Inventor
Hiromi Sekiyama
関山 広美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP30373286A priority Critical patent/JPS63157030A/en
Publication of JPS63157030A publication Critical patent/JPS63157030A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material

Abstract

PURPOSE:To conduct an accurate leak test by blowing gaseous nitrogen for sealing to the joined part of a body to be tested locally and forming a gas film, and preventing a gaseous helium layer for detection from leaking to an atmosphere. CONSTITUTION:The inside 2 of a vacuum container 1 is evacuated by an exhauster 9, and when a specific vacuum degree is reached, a probe 4 is put close to the joined part 3 of the vacuum container 1 to blow the gaseous nitrogen 5A to nearby the joined part 3, thereby forming the gaseous nitrogen layer 5B. The probe 4 performs the evacuation from an exhaust port 7 and recovers the gas of the gas layer 5B so that it is scattered after striking on periphery of the joined part 3. This state is held for several seconds and then the inside surrounded with the gas layer 5B in the space of the joined part 3 and probe 4 becomes a vacuum space 11. Then the gaseous helium 6A is blown to the joined part 3 to form the gaseous helium layer 6B. The mixed gas 8 of the gaseous helium 6A after striking on the joined part 3 and part of the gaseous nitrogen 5A is recovered through the exhaust port 7. The gaseous helium 6A leaking from the joined part 3 to the inside 2 of the container is measured by a helium leak detector 10.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、核融合及び超電導実験装置の組立品のリーク
テストに係り、特に、装置の大型化及び複雑化に対し簡
単で高精度なリーク量検出に好適なプローブに関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to leak testing of assemblies of nuclear fusion and superconducting experimental equipment, and particularly relates to leak testing of assemblies of nuclear fusion and superconducting experimental equipment, and in particular, to a simple and highly accurate leak test for larger and more complex equipment. This invention relates to a probe suitable for quantity detection.

〔従来の技術〕[Conventional technology]

ヘリウムリークデテクタまたは、ガス分析機器を用いる
被試験体のリークテストには、従来、次の二通りがある
。例えば、特開昭58−85129号公報に示されるよ
うに、部品単独及び組立完了後に被試験体の被試験部を
プラスチックシートで覆い、被試験部とプラスチックシ
ート空間を真空排気し。
Conventionally, there are two types of leak tests for test objects using helium leak detectors or gas analysis equipment: For example, as shown in Japanese Unexamined Patent Application Publication No. 58-85129, the test section of the test object is covered with a plastic sheet after each component or assembly is completed, and the space between the test section and the plastic sheet is evacuated.

その空間にヘリウムガスを注入操作と真空排気を繰返し
てヘリウムガスに置換する。被試験内部に漏れるヘリウ
ムガスをヘリウムリークデテクタまたは、ガス分析機器
でリーク量を検出する。
Injecting helium gas into the space and evacuation are repeated to replace the space with helium gas. Detect the amount of helium gas leaking into the test object using a helium leak detector or gas analyzer.

又、実公昭58−44352号公報に示されるように被
試験体の内部に真空排気後、被試験体表面の接合部にノ
ズル管の先端を近づけ、ノズル管内からテスト用ヘリウ
ムガスを接合部に向けて吐出する。
Also, as shown in Japanese Utility Model Publication No. 58-44352, after evacuating the inside of the test object, the tip of the nozzle tube is brought close to the joint on the surface of the test object, and helium gas for testing is applied to the joint from inside the nozzle pipe. Discharge toward the target.

吐出されたヘリウムガスは、接合部に当たった後、ノズ
ル管と同芯で、しかも、先端がラッパ状に拡開された吸
引管に回収される。
After the discharged helium gas hits the joint, it is collected into a suction tube that is concentric with the nozzle tube and has a trumpet-shaped tip.

被試験体の内部に漏れるヘリウムガスはヘリウムリーク
デテクタ、または、ガス分析機器で検出する。
Helium gas leaking into the test object is detected using a helium leak detector or gas analysis equipment.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記従来技術は、核融合及び超電導実験装置の組立完了
品のリークテストにおいて、装置の大型化により全体マ
スキングが国璽となり、また、形状の複雑化に伴い、プ
ラスチックシートによるマスキングができないため、正
確なリーク量が計測出来ず、しかも、リーク場所を発見
することが困難であった。また、ノズル管の先端を被試
験体接合部に近づけてヘリウムガスを接合部に吹付ける
方法では、ヘリウムガスを吹付けている接合部以外に廻
り込むため検出感度が低くなる。従ってリークテストの
信頼性に問題があった。
The above-mentioned conventional technology does not allow accurate leak testing of assembled nuclear fusion and superconducting experimental equipment because the large size of the equipment requires masking the entire body, and masking with a plastic sheet is not possible due to the complexity of the shape. It was not possible to measure the amount of leakage, and furthermore, it was difficult to find the location of the leakage. Furthermore, in a method in which helium gas is sprayed onto the joint by bringing the tip of the nozzle pipe close to the joint of the test object, the detection sensitivity is lowered because the helium gas goes around other than the joint where it is being sprayed. Therefore, there was a problem with the reliability of the leak test.

本発明は、上記装置の大型化及び形状の複雑化に対する
リークテストにおいて、高精度なリーク量検出、及び、
リーク場所を容易に検出可能なプローブを提供すること
を目的とする。
The present invention provides highly accurate leakage detection and
The purpose of the present invention is to provide a probe that can easily detect a leak location.

〔問題点を解決するための手段〕[Means for solving problems]

上記目的は、リーク量検出ガス吹付管より吐出されたガ
スが周囲に拡散するのを防ぐため、検出ガス吹付管に同
芯で先端を突出して配設されたノズル部より検出ガスを
シールするガスを吹付け、両ガスの間に同芯で両ノズル
管の先端より内側に配設された回収管により、被試験体
の接合部を局部的にシールガスを吹付けてガス膜を形成
し、その空間にノズル管の中心部から検出ガスを注入し
、その空間からの検出ガスの散乱を防ぐため、回収管の
回収率とガス圧をWl整することにより達成される。
The purpose of the above is to prevent the gas discharged from the leakage detection gas spraying tube from spreading to the surrounding area.The gas is sealed from the nozzle part, which is installed concentrically with the detection gas spraying tube and has a protruding tip. A gas film is formed by spraying a sealing gas locally onto the joint of the test object using a recovery pipe placed concentrically between the two gases and inside the tips of both nozzle pipes. This is achieved by injecting the detection gas into the space from the center of the nozzle pipe and adjusting the recovery rate and gas pressure of the recovery pipe at Wl in order to prevent the detection gas from scattering from the space.

〔作用〕[Effect]

検出ガスをシールするノズル部が検出ガス吐出部より突
出されたノズル管からシールガスが被試験体の接合部を
局部的に吹付けて、ノズルに備えた回収口の排気圧によ
り、ガス膜が形成される。
The nozzle part that seals the detection gas blows the sealing gas locally onto the joint of the test object from the nozzle pipe that protrudes from the detection gas discharge part, and the exhaust pressure from the recovery port provided in the nozzle causes a gas film to form. It is formed.

従って、ノズル管の中心部から検出ガスを被試験体の接
合部に局部的に吹付けても、検出ガスが大気中に漏れる
ことがなくなるため、検出ガスの密度が高くなるので、
高精度なリークテストが可能となる。
Therefore, even if the detection gas is locally sprayed from the center of the nozzle pipe to the joint of the test object, the detection gas will not leak into the atmosphere, and the density of the detection gas will increase.
Highly accurate leak testing becomes possible.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図及び第2図に基づいて
説明する。ヘリウムガス6Aをシールするノズル部が、
検出用ヘリウムガス吐出部より突出されたノズル管から
、シール用窒素ガス5Aが被試験体の接合部3を局部的
に吹付けて、ノズルに備えた回収ロアの排気圧によりガ
ス膜5Bが形成される。従って、検出用ヘリウムガスH
6Bが大気に漏れることがなくなり、ヘリウムの密度が
高くなるので高精度なリークテストが可能となる。
Hereinafter, one embodiment of the present invention will be described based on FIGS. 1 and 2. The nozzle part that seals helium gas 6A is
The sealing nitrogen gas 5A is locally sprayed onto the joint 3 of the test object from the nozzle pipe protruding from the detection helium gas discharge part, and a gas film 5B is formed by the exhaust pressure of the recovery lower provided in the nozzle. be done. Therefore, helium gas H for detection
Since 6B will not leak into the atmosphere and the density of helium will be increased, highly accurate leak tests will be possible.

第1図は、真空容器1の内部2を排気装置9で、真空引
きし、規定真空度に達したら、プローブ4を真空容器1
の接合部3に近づけ、窒素ガス5Aを接合部3の近傍に
吹付けることにより窒素ガスW5Bができる。その時、
プローブ4は排気ロアより真空引きを実施し、窒素ガス
層5Bのガスが接合部3の近傍に当った後、散乱しない
ように排気ロアより回収する。その状態を数秒間保持す
ると自動的に接合部3とプローブ4の空間を窒素ガス層
5Bで囲まれた内部が真空の空間11になる。
In FIG. 1, the interior 2 of a vacuum container 1 is evacuated with an exhaust device 9, and when a specified degree of vacuum is reached, a probe 4 is inserted into the vacuum container 1.
Nitrogen gas W5B is produced by blowing nitrogen gas 5A near the joint 3. At that time,
The probe 4 performs evacuation through the exhaust lower, and after the gas in the nitrogen gas layer 5B hits the vicinity of the joint 3, it is collected through the exhaust lower so as not to be scattered. When this state is maintained for several seconds, the space between the joint 3 and the probe 4 automatically becomes a vacuum space 11 surrounded by the nitrogen gas layer 5B.

その空間11の接合部3にヘリウムガス6Aを吹付はヘ
リウムガスft6Bができる。その時、接合部3に当っ
た後のヘリウムがス6Aと一部の窒素ガス5Aの混合気
8は、排気ロアで回収される。
When helium gas 6A is sprayed onto the joint 3 in the space 11, helium gas ft6B is produced. At this time, the mixture 8 of the helium gas 6A and part of the nitrogen gas 5A after hitting the joint 3 is recovered by the exhaust lower.

真空容器1の接合部3より真空容器内部2にヘリウムガ
ス6Aが漏れたのをヘリウムリークデテクタ10で測定
する。排気ロアは多重に設けても効果は同様である。
A helium leak detector 10 measures the leakage of helium gas 6A from the joint 3 of the vacuum container 1 into the interior 2 of the vacuum container. The effect is the same even if multiple exhaust lowers are provided.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、被試験体の接合部を局部的に窒素ガス
で膜を形成することができるので、大型及び形状の複雑
な装置のリークテストでも検出用ヘリウムガスの廻り込
みがなくなるため、高精度なリーク量を計測し、リーク
場所を容易に発見することができる。
According to the present invention, it is possible to locally form a film with nitrogen gas on the joints of the test object, so even in leak tests of large and complex-shaped devices, there is no possibility of helium gas for detection going around. The amount of leak can be measured with high precision and the location of the leak can be easily discovered.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は、本発明の一実施例を示す正面図及
び平面図である。 1・・・真空容器、2・・・真空容器内部、3・・・接
合部。
1 and 2 are a front view and a plan view showing an embodiment of the present invention. 1...Vacuum container, 2...Inside of vacuum container, 3...Joint part.

Claims (1)

【特許請求の範囲】[Claims] 1、リーク量検出ガスを吐出する第一のノズル管と、前
記第一のノズル管と同芯で、外周に配設され、その先端
が前記第一のノズル管より突出し、その先端から検出ガ
スをシールするガスが吐出される第二のノズル管と前記
第二のノズル管の間に同芯で、前記第一および前記第二
のノズル管の先端より内側に配設された回収管とを具え
ることを特徴とするリークテスト用ブローブ。
1. A first nozzle pipe that discharges the leakage detection gas; a first nozzle pipe that is concentric with the first nozzle pipe and arranged on the outer periphery, the tip of which protrudes from the first nozzle pipe; a second nozzle pipe from which gas is discharged to seal the gas, and a recovery pipe disposed concentrically between the second nozzle pipe and inside the tips of the first and second nozzle pipes. A leak test probe characterized by:
JP30373286A 1986-12-22 1986-12-22 Probe for leak test Pending JPS63157030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30373286A JPS63157030A (en) 1986-12-22 1986-12-22 Probe for leak test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30373286A JPS63157030A (en) 1986-12-22 1986-12-22 Probe for leak test

Publications (1)

Publication Number Publication Date
JPS63157030A true JPS63157030A (en) 1988-06-30

Family

ID=17924600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30373286A Pending JPS63157030A (en) 1986-12-22 1986-12-22 Probe for leak test

Country Status (1)

Country Link
JP (1) JPS63157030A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106969872A (en) * 2017-04-18 2017-07-21 北京航空航天大学 A kind of pressure probe of use double-row hole gaseous film control

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106969872A (en) * 2017-04-18 2017-07-21 北京航空航天大学 A kind of pressure probe of use double-row hole gaseous film control
CN106969872B (en) * 2017-04-18 2020-01-10 北京航空航天大学 Pressure probe adopting double-row-hole air film cooling

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