JPS63156861U - - Google Patents

Info

Publication number
JPS63156861U
JPS63156861U JP5072287U JP5072287U JPS63156861U JP S63156861 U JPS63156861 U JP S63156861U JP 5072287 U JP5072287 U JP 5072287U JP 5072287 U JP5072287 U JP 5072287U JP S63156861 U JPS63156861 U JP S63156861U
Authority
JP
Japan
Prior art keywords
lifter
nozzle
supply path
cleaning liquid
liquid supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5072287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5072287U priority Critical patent/JPS63156861U/ja
Publication of JPS63156861U publication Critical patent/JPS63156861U/ja
Pending legal-status Critical Current

Links

JP5072287U 1987-04-03 1987-04-03 Pending JPS63156861U (lm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5072287U JPS63156861U (lm) 1987-04-03 1987-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5072287U JPS63156861U (lm) 1987-04-03 1987-04-03

Publications (1)

Publication Number Publication Date
JPS63156861U true JPS63156861U (lm) 1988-10-14

Family

ID=30874342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5072287U Pending JPS63156861U (lm) 1987-04-03 1987-04-03

Country Status (1)

Country Link
JP (1) JPS63156861U (lm)

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