JPS63156709U - - Google Patents
Info
- Publication number
- JPS63156709U JPS63156709U JP4874287U JP4874287U JPS63156709U JP S63156709 U JPS63156709 U JP S63156709U JP 4874287 U JP4874287 U JP 4874287U JP 4874287 U JP4874287 U JP 4874287U JP S63156709 U JPS63156709 U JP S63156709U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- main body
- apparatus main
- contact portion
- frame portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048742U JPH05326Y2 (en18) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048742U JPH05326Y2 (en18) | 1987-03-31 | 1987-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63156709U true JPS63156709U (en18) | 1988-10-14 |
| JPH05326Y2 JPH05326Y2 (en18) | 1993-01-07 |
Family
ID=30870559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987048742U Expired - Lifetime JPH05326Y2 (en18) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05326Y2 (en18) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028748A (en18) * | 1973-07-13 | 1975-03-24 | ||
| JPS5147564A (en) * | 1974-10-23 | 1976-04-23 | Daido Steel Co Ltd | Kinzokufunmatsuno seizohoho |
| JPS5147565A (ja) * | 1974-10-23 | 1976-04-23 | Chukyo Electric Co | Hariganechokusensochi |
-
1987
- 1987-03-31 JP JP1987048742U patent/JPH05326Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028748A (en18) * | 1973-07-13 | 1975-03-24 | ||
| JPS5147564A (en) * | 1974-10-23 | 1976-04-23 | Daido Steel Co Ltd | Kinzokufunmatsuno seizohoho |
| JPS5147565A (ja) * | 1974-10-23 | 1976-04-23 | Chukyo Electric Co | Hariganechokusensochi |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05326Y2 (en18) | 1993-01-07 |