JPS63155882U - - Google Patents
Info
- Publication number
- JPS63155882U JPS63155882U JP4944087U JP4944087U JPS63155882U JP S63155882 U JPS63155882 U JP S63155882U JP 4944087 U JP4944087 U JP 4944087U JP 4944087 U JP4944087 U JP 4944087U JP S63155882 U JPS63155882 U JP S63155882U
- Authority
- JP
- Japan
- Prior art keywords
- pinion
- rotation angle
- rack
- drive means
- clutch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Control Of Conveyors (AREA)
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4944087U JPS63155882U (enExample) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4944087U JPS63155882U (enExample) | 1987-03-31 | 1987-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63155882U true JPS63155882U (enExample) | 1988-10-13 |
Family
ID=30871895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4944087U Pending JPS63155882U (enExample) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155882U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013177975A (ja) * | 2008-12-09 | 2013-09-09 | Canon Anelva Corp | ラック・アンド・ピニオン機構及び真空処理装置 |
-
1987
- 1987-03-31 JP JP4944087U patent/JPS63155882U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013177975A (ja) * | 2008-12-09 | 2013-09-09 | Canon Anelva Corp | ラック・アンド・ピニオン機構及び真空処理装置 |