JPS63155882U - - Google Patents
Info
- Publication number
- JPS63155882U JPS63155882U JP4944087U JP4944087U JPS63155882U JP S63155882 U JPS63155882 U JP S63155882U JP 4944087 U JP4944087 U JP 4944087U JP 4944087 U JP4944087 U JP 4944087U JP S63155882 U JPS63155882 U JP S63155882U
- Authority
- JP
- Japan
- Prior art keywords
- pinion
- rotation angle
- rack
- drive means
- clutch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Control Of Conveyors (AREA)
- Transmission Devices (AREA)
Description
第１図は本考案にかかる搬送装置における基板
ホルダの搬送過程を説明するチヤンバの模式的平
面図、第２図は第１図のＡ―Ｂ断面図及び搬送装
置の簡略構成図、第３図は搬送装置の動作説明を
行う主要信号等のタイミングチヤート、第４図は
従来の搬送装置におけるラツク・ピニオン機構の
噛み合いを説明する図である。
２０……台車、２１……ラツク、３１……ピニ
オン、４０……クラツチ、５０……搬送駆動手段
、６０……位置検出器、７０……回転角検出器、
８０……シーケンス制御部。
FIG. 1 is a schematic plan view of a chamber for explaining the process of transporting a substrate holder in a transport device according to the present invention, FIG. 2 is a sectional view taken along line A-B in FIG. 1 and a simplified configuration diagram of the transport device, and FIG. 4 is a timing chart of main signals etc. for explaining the operation of the conveying device, and FIG. 4 is a diagram for explaining the meshing of the rack and pinion mechanism in the conventional conveying device. 20... Truck, 21... Rack, 31... Pinion, 40... Clutch, 50... Transport drive means, 60... Position detector, 70... Rotation angle detector,
80...Sequence control unit.
Claims (1)
に噛み合うピニオンを回転させる回転駆動手段と
、前記ピニオンの軸と前記回転駆動手段における
回転駆動軸とを連結又は連結解除を行うクラツチ
と、前記ピニオンの回転角度を検知する回転角検
出器と、前記台車の搬送位置を検知する位置検出
器と、前記回転角検出器と前記位置検出器との検
知結果に基づいて前記回転角駆動手段と前記クラ
ツチとを制御するものであり、前記ラツクと前記
ピニオンとが噛み合うまでに、ピニオンの回転角
度を両者が円滑噛み合い可能となるように調節し
、その後前記クラツチを連結解除するようにして
あるシーケンス制御部とを具備することを特徴と
する搬送装置。 In order to move a truck equipped with a rack, a rotation drive means for rotating a pinion meshing with the rack, a clutch for coupling or disconnecting the shaft of the pinion and a rotation drive shaft of the rotation drive means, and a rotation angle detector for detecting a rotation angle; a position detector for detecting a conveyance position of the cart; and a rotation angle drive means and a clutch based on the detection results of the rotation angle detector and the position detector. The sequence control section is configured to adjust the rotation angle of the pinion so that the rack and the pinion can be smoothly engaged before the rack and the pinion are engaged, and then release the clutch. A conveying device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4944087U JPS63155882U (en) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4944087U JPS63155882U (en) | 1987-03-31 | 1987-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63155882U true JPS63155882U (en) | 1988-10-13 |
Family
ID=30871895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4944087U Pending JPS63155882U (en) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155882U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013177975A (en) * | 2008-12-09 | 2013-09-09 | Canon Anelva Corp | Rack and pinion mechanism and vacuum processing apparatus |
-
1987
- 1987-03-31 JP JP4944087U patent/JPS63155882U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013177975A (en) * | 2008-12-09 | 2013-09-09 | Canon Anelva Corp | Rack and pinion mechanism and vacuum processing apparatus |
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