JPS63155882U - - Google Patents

Info

Publication number
JPS63155882U
JPS63155882U JP4944087U JP4944087U JPS63155882U JP S63155882 U JPS63155882 U JP S63155882U JP 4944087 U JP4944087 U JP 4944087U JP 4944087 U JP4944087 U JP 4944087U JP S63155882 U JPS63155882 U JP S63155882U
Authority
JP
Japan
Prior art keywords
pinion
rotation angle
rack
drive means
clutch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4944087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4944087U priority Critical patent/JPS63155882U/ja
Publication of JPS63155882U publication Critical patent/JPS63155882U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Conveyors (AREA)
  • Transmission Devices (AREA)
JP4944087U 1987-03-31 1987-03-31 Pending JPS63155882U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4944087U JPS63155882U (enrdf_load_stackoverflow) 1987-03-31 1987-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4944087U JPS63155882U (enrdf_load_stackoverflow) 1987-03-31 1987-03-31

Publications (1)

Publication Number Publication Date
JPS63155882U true JPS63155882U (enrdf_load_stackoverflow) 1988-10-13

Family

ID=30871895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4944087U Pending JPS63155882U (enrdf_load_stackoverflow) 1987-03-31 1987-03-31

Country Status (1)

Country Link
JP (1) JPS63155882U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013177975A (ja) * 2008-12-09 2013-09-09 Canon Anelva Corp ラック・アンド・ピニオン機構及び真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013177975A (ja) * 2008-12-09 2013-09-09 Canon Anelva Corp ラック・アンド・ピニオン機構及び真空処理装置

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