JPS6315549U - - Google Patents

Info

Publication number
JPS6315549U
JPS6315549U JP10865886U JP10865886U JPS6315549U JP S6315549 U JPS6315549 U JP S6315549U JP 10865886 U JP10865886 U JP 10865886U JP 10865886 U JP10865886 U JP 10865886U JP S6315549 U JPS6315549 U JP S6315549U
Authority
JP
Japan
Prior art keywords
ion source
capacitor electrode
phase ion
gas
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10865886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448626Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10865886U priority Critical patent/JPH0448626Y2/ja
Publication of JPS6315549U publication Critical patent/JPS6315549U/ja
Application granted granted Critical
Publication of JPH0448626Y2 publication Critical patent/JPH0448626Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10865886U 1986-07-15 1986-07-15 Expired JPH0448626Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10865886U JPH0448626Y2 (US20100056889A1-20100304-C00004.png) 1986-07-15 1986-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10865886U JPH0448626Y2 (US20100056889A1-20100304-C00004.png) 1986-07-15 1986-07-15

Publications (2)

Publication Number Publication Date
JPS6315549U true JPS6315549U (US20100056889A1-20100304-C00004.png) 1988-02-01
JPH0448626Y2 JPH0448626Y2 (US20100056889A1-20100304-C00004.png) 1992-11-16

Family

ID=30986057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10865886U Expired JPH0448626Y2 (US20100056889A1-20100304-C00004.png) 1986-07-15 1986-07-15

Country Status (1)

Country Link
JP (1) JPH0448626Y2 (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0462651U (US20100056889A1-20100304-C00004.png) * 1990-10-11 1992-05-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0462651U (US20100056889A1-20100304-C00004.png) * 1990-10-11 1992-05-28

Also Published As

Publication number Publication date
JPH0448626Y2 (US20100056889A1-20100304-C00004.png) 1992-11-16

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