JPS63154666U - - Google Patents

Info

Publication number
JPS63154666U
JPS63154666U JP4729387U JP4729387U JPS63154666U JP S63154666 U JPS63154666 U JP S63154666U JP 4729387 U JP4729387 U JP 4729387U JP 4729387 U JP4729387 U JP 4729387U JP S63154666 U JPS63154666 U JP S63154666U
Authority
JP
Japan
Prior art keywords
nitride film
section
film growth
plasma cvd
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4729387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4729387U priority Critical patent/JPS63154666U/ja
Publication of JPS63154666U publication Critical patent/JPS63154666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP4729387U 1987-03-30 1987-03-30 Pending JPS63154666U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4729387U JPS63154666U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4729387U JPS63154666U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Publications (1)

Publication Number Publication Date
JPS63154666U true JPS63154666U (enrdf_load_stackoverflow) 1988-10-11

Family

ID=30867763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4729387U Pending JPS63154666U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPS63154666U (enrdf_load_stackoverflow)

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