JPS63153524U - - Google Patents
Info
- Publication number
- JPS63153524U JPS63153524U JP4807987U JP4807987U JPS63153524U JP S63153524 U JPS63153524 U JP S63153524U JP 4807987 U JP4807987 U JP 4807987U JP 4807987 U JP4807987 U JP 4807987U JP S63153524 U JPS63153524 U JP S63153524U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- chamber provided
- lamp annealing
- jigs
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807987U JPS63153524U (enExample) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807987U JPS63153524U (enExample) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153524U true JPS63153524U (enExample) | 1988-10-07 |
Family
ID=30869281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4807987U Pending JPS63153524U (enExample) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153524U (enExample) |
-
1987
- 1987-03-30 JP JP4807987U patent/JPS63153524U/ja active Pending
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