JPS63153519U - - Google Patents
Info
- Publication number
- JPS63153519U JPS63153519U JP4598687U JP4598687U JPS63153519U JP S63153519 U JPS63153519 U JP S63153519U JP 4598687 U JP4598687 U JP 4598687U JP 4598687 U JP4598687 U JP 4598687U JP S63153519 U JPS63153519 U JP S63153519U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- transfer table
- endless belt
- workpiece transfer
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 239000011888 foil Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4598687U JPH0521865Y2 (enExample) | 1987-03-28 | 1987-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4598687U JPH0521865Y2 (enExample) | 1987-03-28 | 1987-03-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63153519U true JPS63153519U (enExample) | 1988-10-07 |
| JPH0521865Y2 JPH0521865Y2 (enExample) | 1993-06-04 |
Family
ID=30865231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4598687U Expired - Lifetime JPH0521865Y2 (enExample) | 1987-03-28 | 1987-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521865Y2 (enExample) |
-
1987
- 1987-03-28 JP JP4598687U patent/JPH0521865Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521865Y2 (enExample) | 1993-06-04 |
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