JPS63153517U - - Google Patents

Info

Publication number
JPS63153517U
JPS63153517U JP4604987U JP4604987U JPS63153517U JP S63153517 U JPS63153517 U JP S63153517U JP 4604987 U JP4604987 U JP 4604987U JP 4604987 U JP4604987 U JP 4604987U JP S63153517 U JPS63153517 U JP S63153517U
Authority
JP
Japan
Prior art keywords
cassette
side plates
wafer cassette
base
rear support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4604987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0625014Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987046049U priority Critical patent/JPH0625014Y2/ja
Publication of JPS63153517U publication Critical patent/JPS63153517U/ja
Application granted granted Critical
Publication of JPH0625014Y2 publication Critical patent/JPH0625014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1987046049U 1987-03-28 1987-03-28 ウエ−ハカセツト Expired - Lifetime JPH0625014Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987046049U JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987046049U JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Publications (2)

Publication Number Publication Date
JPS63153517U true JPS63153517U (US20020193084A1-20021219-M00002.png) 1988-10-07
JPH0625014Y2 JPH0625014Y2 (ja) 1994-06-29

Family

ID=30865350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987046049U Expired - Lifetime JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Country Status (1)

Country Link
JP (1) JPH0625014Y2 (US20020193084A1-20021219-M00002.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS6149447U (US20020193084A1-20021219-M00002.png) * 1984-09-03 1986-04-03
JPS62163949U (US20020193084A1-20021219-M00002.png) * 1986-04-09 1987-10-17

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS6149447U (US20020193084A1-20021219-M00002.png) * 1984-09-03 1986-04-03
JPS62163949U (US20020193084A1-20021219-M00002.png) * 1986-04-09 1987-10-17

Also Published As

Publication number Publication date
JPH0625014Y2 (ja) 1994-06-29

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