JPS63152684U - - Google Patents

Info

Publication number
JPS63152684U
JPS63152684U JP4389787U JP4389787U JPS63152684U JP S63152684 U JPS63152684 U JP S63152684U JP 4389787 U JP4389787 U JP 4389787U JP 4389787 U JP4389787 U JP 4389787U JP S63152684 U JPS63152684 U JP S63152684U
Authority
JP
Japan
Prior art keywords
disk
pedestal
center
hole
uniform film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4389787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH067817Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4389787U priority Critical patent/JPH067817Y2/ja
Publication of JPS63152684U publication Critical patent/JPS63152684U/ja
Application granted granted Critical
Publication of JPH067817Y2 publication Critical patent/JPH067817Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP4389787U 1987-03-25 1987-03-25 回転塗布装置 Expired - Lifetime JPH067817Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4389787U JPH067817Y2 (ja) 1987-03-25 1987-03-25 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4389787U JPH067817Y2 (ja) 1987-03-25 1987-03-25 回転塗布装置

Publications (2)

Publication Number Publication Date
JPS63152684U true JPS63152684U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-06
JPH067817Y2 JPH067817Y2 (ja) 1994-03-02

Family

ID=30861194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4389787U Expired - Lifetime JPH067817Y2 (ja) 1987-03-25 1987-03-25 回転塗布装置

Country Status (1)

Country Link
JP (1) JPH067817Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03254853A (ja) * 1989-12-08 1991-11-13 Origin Electric Co Ltd スピンナ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03254853A (ja) * 1989-12-08 1991-11-13 Origin Electric Co Ltd スピンナ装置

Also Published As

Publication number Publication date
JPH067817Y2 (ja) 1994-03-02

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