JPS63152654U - - Google Patents
Info
- Publication number
- JPS63152654U JPS63152654U JP4360587U JP4360587U JPS63152654U JP S63152654 U JPS63152654 U JP S63152654U JP 4360587 U JP4360587 U JP 4360587U JP 4360587 U JP4360587 U JP 4360587U JP S63152654 U JPS63152654 U JP S63152654U
- Authority
- JP
- Japan
- Prior art keywords
- liquid container
- rotor
- drive shaft
- spin dryer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987043605U JPH069498Y2 (ja) | 1987-03-24 | 1987-03-24 | スピンドライヤ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987043605U JPH069498Y2 (ja) | 1987-03-24 | 1987-03-24 | スピンドライヤ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63152654U true JPS63152654U (enExample) | 1988-10-06 |
| JPH069498Y2 JPH069498Y2 (ja) | 1994-03-09 |
Family
ID=30860620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987043605U Expired - Lifetime JPH069498Y2 (ja) | 1987-03-24 | 1987-03-24 | スピンドライヤ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069498Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
| JPS6142919A (ja) * | 1984-08-01 | 1986-03-01 | エフエスアイ コーポレイシヨン | 基板処理機のためのラビリンスシール |
-
1987
- 1987-03-24 JP JP1987043605U patent/JPH069498Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
| JPS6142919A (ja) * | 1984-08-01 | 1986-03-01 | エフエスアイ コーポレイシヨン | 基板処理機のためのラビリンスシール |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069498Y2 (ja) | 1994-03-09 |