JPS63152045A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPS63152045A JPS63152045A JP30079686A JP30079686A JPS63152045A JP S63152045 A JPS63152045 A JP S63152045A JP 30079686 A JP30079686 A JP 30079686A JP 30079686 A JP30079686 A JP 30079686A JP S63152045 A JPS63152045 A JP S63152045A
- Authority
- JP
- Japan
- Prior art keywords
- film
- recording layer
- magnetic field
- perpendicularly magnetized
- projections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims abstract description 22
- 230000005415 magnetization Effects 0.000 claims abstract description 20
- 239000011241 protective layer Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000003989 dielectric material Substances 0.000 claims abstract description 5
- 239000010408 film Substances 0.000 claims description 31
- 239000010409 thin film Substances 0.000 claims description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 claims 1
- 230000005381 magnetic domain Effects 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000956 alloy Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 9
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 6
- 239000010952 cobalt-chrome Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は光磁気メモリに用いられる記録媒体に関するも
のであり、更に詳しくは膜面と垂直方向に磁化容易軸を
有する磁性膜を記録層とし、レーザなどの光ビームを照
射した領域に反転磁区を作ることにより情報を記録する
ことができ、磁気光学効果を利用して読み出すことので
きる光磁気記録媒体に関する゛ものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a recording medium used in a magneto-optical memory, and more specifically, the present invention relates to a recording medium used in a magneto-optical memory. The present invention relates to a magneto-optical recording medium in which information can be recorded by creating inverted magnetic domains in a region irradiated with a light beam such as a laser, and which can be read out using the magneto-optic effect.
(従来の技術)
光メモリは大容量ファイルメモリの一つとして注目され
ている。中でも光磁気メモリは、記録情報の書き替えが
可能であるという利点を持っていることから、各所で盛
んに研究されている。その記録媒体としては、Tb、G
d、Py、Hoなどの希土類金属とFe、Co、Niな
どの遷移金属との組み合せによって作製される非晶質磁
性薄膜が、記録感度が高い、粒界ノイズがない、膜面に
垂直方向の磁気異方性を有する膜が容易に作れるなどの
利点を有するため、最も有望視されている。(Prior Art) Optical memory is attracting attention as a type of large-capacity file memory. Among them, magneto-optical memory has the advantage that recorded information can be rewritten, and is therefore being actively researched in various places. As the recording medium, Tb, G
Amorphous magnetic thin films fabricated by combining rare earth metals such as d, Py, and Ho with transition metals such as Fe, Co, and Ni have high recording sensitivity, no grain boundary noise, and magnetic properties perpendicular to the film surface. It is considered the most promising because it has the advantage of being able to easily produce a film with magnetic anisotropy.
従来、この様な記録媒体に対する、情報の記録・消去は
次の様に行われる。記録は、一方向に着磁した記録媒体
にレーザ光ビームを照射して、媒体温度をキューり温度
Tcもしくは補償温度Tcomρ以上に上昇させ、外部
印加磁界と記録媒体の反磁界によって反転磁区を形成す
ることにより行われる。消去は、外部磁界を記録時とは
逆極性に印加し、レーザ光ビームを記録時と同等の強度
で、記録媒体に一様に照射する、いわゆる一括消去によ
り行われる。これにより、記録媒体の磁化状態は記録前
の初期状態に戻る。Conventionally, information is recorded and erased on such a recording medium as follows. Recording involves irradiating a unidirectionally magnetized recording medium with a laser beam to raise the medium temperature above the cue temperature Tc or compensation temperature Tcomρ, and forming reversed magnetic domains using an externally applied magnetic field and a demagnetizing field of the recording medium. It is done by doing. Erasing is performed by applying an external magnetic field with a polarity opposite to that during recording and uniformly irradiating the recording medium with a laser beam with the same intensity as during recording, so-called batch erasing. As a result, the magnetization state of the recording medium returns to the initial state before recording.
(発明が解決しようとする問題点)
この様に従来の光磁気記録媒体に対して記録を行う場合
には、レーザ光ビームを発生する光学系以外に、外部磁
界印加手段が必須であるため、光磁気記録・再生装置の
構成は複雑になる傾向があった。(Problems to be Solved by the Invention) When recording on a conventional magneto-optical recording medium as described above, in addition to the optical system that generates the laser beam, an external magnetic field applying means is essential. The configuration of magneto-optical recording and reproducing devices has tended to be complicated.
本発明の目的は、外部磁界印加手段を必要とせずにバイ
アス磁界を印加することができる光磁気記録媒体を提供
することにある。An object of the present invention is to provide a magneto-optical recording medium that can apply a bias magnetic field without requiring an external magnetic field applying means.
(問題点を解決するための手段)
本発明の光磁気記録媒体は、基体上に、膜面に垂直方向
に、磁気異方性を有する第1の垂直磁化膜から成る突起
が、一定間隔で形成され、次に、第2の垂直磁化膜から
成る記録層、誘電体から成る保護層の順に形成されたこ
とを特徴とする。(Means for Solving the Problems) The magneto-optical recording medium of the present invention has protrusions made of a first perpendicularly magnetized film having magnetic anisotropy arranged on a substrate at regular intervals in a direction perpendicular to the film surface. A recording layer made of a second perpendicularly magnetized film and a protective layer made of a dielectric material are then formed in this order.
(作用)
基体上に形成された垂直磁化膜からなる突起と、第二の
垂直磁化膜から成る記録層を、同じ垂直方向に着磁して
おくことによって、記録層は一方向に初期着磁されると
共に、前記突起の間にある記録層部分には、突起部の磁
化によって、初期着磁とは逆方向にバイアス磁界が印加
される。(Function) By magnetizing the protrusion made of the perpendicularly magnetized film formed on the substrate and the recording layer made of the second perpendicularly magnetized film in the same perpendicular direction, the recording layer is initially magnetized in one direction. At the same time, a bias magnetic field is applied to the portion of the recording layer between the projections in a direction opposite to the initial magnetization due to the magnetization of the projections.
(実施例)
次に本発明の実施例について図面を用いて詳細に説明す
る。第1図は本発明に係る光磁気記録媒体の実施例の断
面構成図を示す。ガラス基板1上に、CoCr合金膜(
組成: Cog、 85coO,+s>等の垂直磁化膜
から成り、高さ約3000λで幅約4000只の台形状
突起2が、約1μmピッチで形成され、これらの上に第
二の垂直磁化膜から成る記録層3として、厚さ3000
人のTbFeCo合金膜(組成:Tbo、zz(Feg
、 gcol)、 り0.78)、さらに、保護層4と
して屈折率2.0、厚さ800人のSi3N4膜の順に
形成されている。(Example) Next, an example of the present invention will be described in detail using the drawings. FIG. 1 shows a cross-sectional configuration diagram of an embodiment of a magneto-optical recording medium according to the present invention. A CoCr alloy film (
Composition: Made of a perpendicular magnetization film such as Cog, 85coO, +s>, trapezoidal protrusions 2 with a height of about 3000λ and a width of about 4000 are formed at a pitch of about 1 μm, and on top of these, a second perpendicular magnetization film is formed. The thickness of the recording layer 3 is 3000 mm.
Human TbFeCo alloy film (composition: Tbo, zz (Feg
, gcol), and 0.78), and a Si3N4 film having a refractive index of 2.0 and a thickness of 800 nm is formed as the protective layer 4 in this order.
各層はマグネトロンスパッタにより成膜される。まずC
oCr合金膜から成る台形状突起2は次の様にして形成
される。ガラス基板上に、CoCr合金ターゲットを用
いて、Arガス雰囲気で、パワー密度4 w / c
m2、スパッタガス圧3.5X 10−’Paで、Co
Cr膜を3000λの厚さにスパッタした後、第2図(
a>に示す様に、厚さ2000λ幅5000λのレジス
トパターン5を1μmピッチで形成し、Arを用いてガ
ス圧2.6X 1O−2Paで12分間イオンミリング
する。さらに酸素プラズマによりレジストをはく離する
ことによって、第2図(b)に示す様に、高さ3000
λ、幅40QOλのCoCr膜から成るらせん状または
同心円状の台形状突起が約1μmピッチで形成される。Each layer is formed by magnetron sputtering. First, C
The trapezoidal protrusion 2 made of an oCr alloy film is formed in the following manner. Power density 4 w/c in Ar gas atmosphere using CoCr alloy target on glass substrate
m2, sputtering gas pressure 3.5X 10-'Pa, Co
After sputtering a Cr film to a thickness of 3000λ,
As shown in a>, a resist pattern 5 having a thickness of 2000λ and a width of 5000λ is formed at a pitch of 1 μm, and ion milling is performed using Ar at a gas pressure of 2.6×10 −2 Pa for 12 minutes. Furthermore, by stripping off the resist using oxygen plasma, a height of 3000 mm was obtained as shown in FIG. 2(b).
Spiral or concentric trapezoidal projections made of a CoCr film with a width of 40QOλ and a width of 40QOλ are formed at a pitch of about 1 μm.
記録層3 TbFeCo合金膜は、FeCoターゲット
上にTb片を配した複合ターゲットを用い、Arガス雰
囲気で、パワー密度4w/crn2、スパッタガス圧3
.5×10”Paで作製される。The recording layer 3 TbFeCo alloy film was formed using a composite target in which Tb pieces were arranged on a FeCo target, in an Ar gas atmosphere, at a power density of 4 w/crn2 and a sputtering gas pressure of 3.
.. It is made with 5×10”Pa.
保護層4 Si3N4膜は、Siターゲットを用い、A
rとN2の混合ガス(45,5%N2)を、スパッタガ
スとした反応性スパッタにより、パワー密度Ow /
c m”、スパッタガス圧2.5X 10−’Paで、
作製される。Protective layer 4 Si3N4 film is formed using a Si target and A
The power density Ow /
cm", sputtering gas pressure 2.5X 10-'Pa,
Created.
次に、本発明による光磁気記録媒体を用いた記録動作を
、第3図を用いて説明する。本媒体の垂直磁化WJ、(
CoCr合金膜)から成る突起2と第二の垂直磁化膜(
TbFeCo合金膜)から成る記録層3を同じ垂直方向
(+、y方向)に、あらかじめ着磁しておくことによっ
て、第3図(a)に示す様に記録層3は一方向に初期着
磁8される。またこれらの突起の間にある記録層には、
突起を成すCoCr合金膜の磁化によって、それらの磁
化とは逆方向(−y方向)にバイアス磁界7を印加する
ことができる。従って、第3図(b)に示す様に、初期
着磁と逆方向<−y方向)に着磁するタイミングに同期
してレーザビーム10を、前記突起の間にある記録層部
分に照射して記録層の温度をキュリ温度以上(220℃
)に上昇するだけで、冷却過程で所望の反転磁区9を形
成することができる。Next, a recording operation using the magneto-optical recording medium according to the present invention will be explained with reference to FIG. Perpendicular magnetization WJ of this medium, (
A protrusion 2 consisting of a CoCr alloy film) and a second perpendicular magnetization film (
By magnetizing the recording layer 3 made of TbFeCo alloy film in the same perpendicular direction (+, y direction) in advance, the recording layer 3 is initially magnetized in one direction as shown in FIG. 3(a). 8. In addition, the recording layer between these protrusions has
The bias magnetic field 7 can be applied in the opposite direction (-y direction) to the magnetization of the CoCr alloy film forming the protrusions. Therefore, as shown in FIG. 3(b), the laser beam 10 is irradiated to the portion of the recording layer between the protrusions in synchronization with the timing of magnetization in the direction opposite to the initial magnetization (<-y direction). to raise the temperature of the recording layer to above the Curie temperature (220°C
), the desired reversed magnetic domain 9 can be formed in the cooling process.
ここで突起を成す垂直磁化膜の高さ及びピッチ等の形状
及び膜組成は、上述のものに限定されるものではなく、
所望の記録媒体の記録密度及びバイアス磁界の大きさに
応じて、適宜選定される。The shape and film composition, such as the height and pitch, of the perpendicularly magnetized film forming the protrusion are not limited to those described above;
It is appropriately selected depending on the recording density of the desired recording medium and the magnitude of the bias magnetic field.
突起の高さとしては、数千オングストローム、ピッチと
しては1μm前後が好ましい。突起の膜組成はCoCr
合金膜以外に、バリウムフェライトの様な垂直磁化膜で
も良い。また、記録層の組成も、上述のものに限定され
るものではなく、抗磁力11cが、上記突起からのバイ
アス磁界より大きくできる範囲で、他の光磁気記録材料
を選定しても良い。誘電体から成る保護層としては、S
i3N4の他にA Q N、SiO□、SiO等を、数
百へ〜数千への厚さに形成したものが用いられる。The height of the protrusions is preferably several thousand angstroms, and the pitch is preferably about 1 μm. The film composition of the protrusion is CoCr
In addition to the alloy film, a perpendicular magnetization film such as barium ferrite may also be used. Furthermore, the composition of the recording layer is not limited to the one described above, and other magneto-optical recording materials may be selected as long as the coercive force 11c can be made larger than the bias magnetic field from the projections. As the protective layer made of dielectric material, S
In addition to i3N4, materials formed of AQN, SiO□, SiO, etc. to a thickness of several hundred to several thousand are used.
(発明の効果)
以上述べた様に、本発明によれば、一方向のバイアス磁
界印加手段を内蔵した光磁気記録媒体を提供できる。従
って、記録層をあらかじめバイアス磁界と逆方向に初期
着磁しておけば、外部磁界印加手段を必要とせずに、レ
ーザビームの照射による昇温だけで、反転磁区の形成が
できる。また、本媒体とバイアス磁界と逆方向にだけ磁
界をスイッチングできる外部磁界印加手段を用いて、一
定レーザビームを照射しながら、前記バイアス磁界と外
部磁界印加手段からの磁界を組み合わせた、磁界変調に
よる記録も容易になる。(Effects of the Invention) As described above, according to the present invention, a magneto-optical recording medium incorporating a unidirectional bias magnetic field applying means can be provided. Therefore, if the recording layer is initially magnetized in advance in a direction opposite to the bias magnetic field, a reversal magnetic domain can be formed simply by raising the temperature by laser beam irradiation without requiring an external magnetic field applying means. In addition, using an external magnetic field applying means that can switch the magnetic field only in the opposite direction to the present medium and the bias magnetic field, while irradiating a constant laser beam, the bias magnetic field and the magnetic field from the external magnetic field applying means are combined. It also makes recording easier.
第1図は本発明の実施例を示す図、第2図は本発明の作
製法を示す図、第3図は本発明の詳細な説明する図であ
る。
図において、1・・・基板、2・・・垂直磁化膜から成
る突起、3・・・記録層、4・・・保護層、5・・・レ
ジストパターン、6・・・突起内の磁化、7・・・突起
内磁化からのバイアス磁界、8・・・初期着磁磁化、9
・・・反転磁化、10・・・レーザビーム、である。FIG. 1 is a diagram showing an embodiment of the invention, FIG. 2 is a diagram showing a manufacturing method of the invention, and FIG. 3 is a diagram illustrating the invention in detail. In the figure, 1... Substrate, 2... Protrusion made of perpendicularly magnetized film, 3... Recording layer, 4... Protective layer, 5... Resist pattern, 6... Magnetization within the protrusion, 7... Bias magnetic field from magnetization within the protrusion, 8... Initial magnetization magnetization, 9
. . . Reversed magnetization, 10 . . . Laser beam.
Claims (2)
する第1の垂直磁化膜から成る突起が一定間隔で形成さ
れ、次に、第2の垂直磁化膜から成る記録層、誘電体か
ら成る保護層の順に形成されたことを特徴とする光磁気
記録媒体。(1) On the substrate, protrusions made of a first perpendicular magnetization film having magnetic anisotropy are formed at regular intervals in a direction perpendicular to the film surface, and then a recording layer made of a second perpendicular magnetization film is formed. , and a protective layer made of a dielectric material are formed in this order.
質磁性合金薄膜である、特許請求の範囲第1項に記載の
光磁気記録媒体。(2) The magneto-optical recording medium according to claim 1, wherein the recording layer made of the second perpendicularly magnetized film is an amorphous magnetic alloy thin film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30079686A JPH0679389B2 (en) | 1986-12-16 | 1986-12-16 | Magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30079686A JPH0679389B2 (en) | 1986-12-16 | 1986-12-16 | Magneto-optical recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63152045A true JPS63152045A (en) | 1988-06-24 |
JPH0679389B2 JPH0679389B2 (en) | 1994-10-05 |
Family
ID=17889202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30079686A Expired - Lifetime JPH0679389B2 (en) | 1986-12-16 | 1986-12-16 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0679389B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991006951A1 (en) * | 1989-11-01 | 1991-05-16 | Nikon Corporation | Pretreatment of overwritable opto-magnetic recording medium and pretreated overwritable opto-magnetic recording medium |
JP2010113760A (en) * | 2008-11-06 | 2010-05-20 | Sharp Corp | Magnetic recording medium, magnetic recording and playback device, and method for recording magnetic information |
-
1986
- 1986-12-16 JP JP30079686A patent/JPH0679389B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991006951A1 (en) * | 1989-11-01 | 1991-05-16 | Nikon Corporation | Pretreatment of overwritable opto-magnetic recording medium and pretreated overwritable opto-magnetic recording medium |
US5258973A (en) * | 1989-11-01 | 1993-11-02 | Nikon Corporation | Method of pre-processing over-write capable magnetooptical recording medium, and pre-processed over-write capable magnetooptical recording medium |
JP2010113760A (en) * | 2008-11-06 | 2010-05-20 | Sharp Corp | Magnetic recording medium, magnetic recording and playback device, and method for recording magnetic information |
Also Published As
Publication number | Publication date |
---|---|
JPH0679389B2 (en) | 1994-10-05 |
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