JPS63151994U - - Google Patents
Info
- Publication number
- JPS63151994U JPS63151994U JP4447887U JP4447887U JPS63151994U JP S63151994 U JPS63151994 U JP S63151994U JP 4447887 U JP4447887 U JP 4447887U JP 4447887 U JP4447887 U JP 4447887U JP S63151994 U JPS63151994 U JP S63151994U
- Authority
- JP
- Japan
- Prior art keywords
- oil
- rotor shaft
- upper bearing
- tapered surface
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003921 oil Substances 0.000 claims 6
- 239000010687 lubricating oil Substances 0.000 claims 1
- 238000005461 lubrication Methods 0.000 claims 1
- 239000000945 filler Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示すＴＭＰの要部
断面図である。第２図は一般的な玉軸受方式によ
るＴＭＰの構造概略を示す断面図である。第３図
は従前例を示すＴＭＰの要部断面図である。
２……ロータシヤフト、６……上部軸受、７…
…下部軸受、８……オイルタンク、９……油通路
、１０，１１……給油口、１２……反射板、１３
……テーパ面、１４……オイルウイツク。
FIG. 1 is a sectional view of a main part of a TMP showing an embodiment of the present invention. FIG. 2 is a sectional view showing the general structure of a TMP using a general ball bearing system. FIG. 3 is a sectional view of a main part of a conventional TMP. 2...Rotor shaft, 6...Upper bearing, 7...
... lower bearing, 8 ... oil tank, 9 ... oil passage, 10, 11 ... oil filler port, 12 ... reflector, 13
...Tapered surface, 14...Oil wick.
Claims (1)
と上部軸受とに、オイルタンクに浸漬される前記
ロータシヤフトの下端から該ロータシヤフトの内
部に設けた油通路を通して潤滑油を供給するよう
にしたターボ分子ポンプにおいて、前記上部軸受
に対する前記油通路からの給油口を該上部軸受の
下方位置に設けるとともに、この給油口直下の前
記ロータシヤフト外周に上広がりのテーパ面を形
成し、このテーパ面にオイルウイツクを巻着した
ことを特徴とするターボ分子ポンプの潤滑機構。 A turbo molecule configured to supply lubricating oil to a lower bearing and an upper bearing that rotatably support a rotor shaft from a lower end of the rotor shaft immersed in an oil tank through an oil passage provided inside the rotor shaft. In the pump, an oil supply port from the oil passage to the upper bearing is provided at a position below the upper bearing, and an upwardly expanding tapered surface is formed on the outer periphery of the rotor shaft immediately below the oil supply port, and an oil wick is provided on this tapered surface. A lubrication mechanism for a turbomolecular pump characterized by a wrapped structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4447887U JPS63151994U (en) | 1987-03-25 | 1987-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4447887U JPS63151994U (en) | 1987-03-25 | 1987-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63151994U true JPS63151994U (en) | 1988-10-05 |
Family
ID=30862328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4447887U Pending JPS63151994U (en) | 1987-03-25 | 1987-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63151994U (en) |
-
1987
- 1987-03-25 JP JP4447887U patent/JPS63151994U/ja active Pending