JPS6315044U - - Google Patents
Info
- Publication number
- JPS6315044U JPS6315044U JP10826386U JP10826386U JPS6315044U JP S6315044 U JPS6315044 U JP S6315044U JP 10826386 U JP10826386 U JP 10826386U JP 10826386 U JP10826386 U JP 10826386U JP S6315044 U JPS6315044 U JP S6315044U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- gas supply
- drying gas
- semiconductor wafer
- spinner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10826386U JPS6315044U (cs) | 1986-07-15 | 1986-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10826386U JPS6315044U (cs) | 1986-07-15 | 1986-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6315044U true JPS6315044U (cs) | 1988-02-01 |
Family
ID=30985295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10826386U Pending JPS6315044U (cs) | 1986-07-15 | 1986-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6315044U (cs) |
-
1986
- 1986-07-15 JP JP10826386U patent/JPS6315044U/ja active Pending