JPS63150236U - - Google Patents
Info
- Publication number
- JPS63150236U JPS63150236U JP4267487U JP4267487U JPS63150236U JP S63150236 U JPS63150236 U JP S63150236U JP 4267487 U JP4267487 U JP 4267487U JP 4267487 U JP4267487 U JP 4267487U JP S63150236 U JPS63150236 U JP S63150236U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- perforated plate
- surrounding
- air filter
- surrounding frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims 3
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4267487U JPH0354339Y2 (OSRAM) | 1987-03-25 | 1987-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4267487U JPH0354339Y2 (OSRAM) | 1987-03-25 | 1987-03-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63150236U true JPS63150236U (OSRAM) | 1988-10-03 |
| JPH0354339Y2 JPH0354339Y2 (OSRAM) | 1991-11-29 |
Family
ID=30858812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4267487U Expired JPH0354339Y2 (OSRAM) | 1987-03-25 | 1987-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354339Y2 (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010227442A (ja) * | 2009-03-27 | 2010-10-14 | Kondo Kogyo Kk | 解剖台におけるホルムアルデヒド拡散防止装置 |
| JP2017118029A (ja) * | 2015-12-25 | 2017-06-29 | 株式会社Screenホールディングス | 基板処理装置 |
-
1987
- 1987-03-25 JP JP4267487U patent/JPH0354339Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010227442A (ja) * | 2009-03-27 | 2010-10-14 | Kondo Kogyo Kk | 解剖台におけるホルムアルデヒド拡散防止装置 |
| JP2017118029A (ja) * | 2015-12-25 | 2017-06-29 | 株式会社Screenホールディングス | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0354339Y2 (OSRAM) | 1991-11-29 |
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