JPS6315002B2 - - Google Patents
Info
- Publication number
- JPS6315002B2 JPS6315002B2 JP59271979A JP27197984A JPS6315002B2 JP S6315002 B2 JPS6315002 B2 JP S6315002B2 JP 59271979 A JP59271979 A JP 59271979A JP 27197984 A JP27197984 A JP 27197984A JP S6315002 B2 JPS6315002 B2 JP S6315002B2
- Authority
- JP
- Japan
- Prior art keywords
- ethanol
- bath
- draining
- concentration
- trifluoroethane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 174
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 claims description 40
- 238000001035 drying Methods 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 239000000243 solution Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 4
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000003021 water soluble solvent Substances 0.000 description 1
Description
［産業上の利用分野］
本発明は、固体物品表面の水分を除去する水切
り乾燥方法に関するものである。
［従来の技術］
金属、プラスチツク、硝子あるいはその他の固
体物品の表面に付着する水分を除去する方法に
は、自然又は熱風乾燥法、遠心脱水法、アルコー
ルやアセトン等の水溶性溶媒を利用する方法ある
いは１，１，２−トリクロロ−１，２，２−トリ
フルオロエタン（以下Ｒ−113という）等のフロ
ン類とアルコールや界面活性剤との混合物を利用
する方法等が知られている。水切り乾燥すべき物
品や光学機器や半導体関連部品等のように精密化
するに従い、水切り乾燥の善し悪しが部品性能の
信頼性に直接影響を与えることが多く、安定した
確実な水切り乾燥方法が求められている。
［発明が解決しようとする問題点］
各種水切り乾燥方法のうち、Ｒ−113とメタノ
ール、エタノール、イソプロパノール等のアルコ
ール類特にＲ−113とエタノールとの混合液を利
用する方法は、非可燃性で脱水速度が速く乾燥後
の物品表面に乾燥じみが残りにくいこと等から有
効な方法とされている。水切り乾燥すべき物品を
Ｒ−113とエタノールとの混合液中に浸漬すると、
物品表面の水分はエタノールの作用により、物品
表面を離れ、水を含んだエタノールは、比重差に
よりＲ−113とエタノールとの混合液上に分離す
る。上層に分離したエタノール水溶液は、蒸留し
てエタノールを回収し、水は排出されることにな
る。従つてＲ−113／エタノール混合液中のエタ
ノール濃度は次第に減少するため、エタノールの
補充を必要とする。一方、脱水速度はＲ−113／
エタノール混合液中のエタノール濃度がある値以
下となると急激に減少すること、及びエタノール
濃度が高くなると可燃性となること等からエタノ
ール濃度を一定に制御する必要がある。エタノー
ル濃度を一定に保つことは、一定した水切り能力
を得ることにもなり、精密部品の水切りには特に
望まれるところである。しかしながら、エタノー
ルの減少量を測ることは、物品表面に付着して自
然乾燥する分等があり容易なことではなく、又、
Ｒ−113も同時に減少するためエタノールの減少
分だけ補充すれば濃度が一定に保てるという問題
ではない。
［問題点を解決するための手段］
本発明は、Ｒ−113／エタノール混合物の液又
は蒸気により水切り乾燥を行うに当り、エタノー
ル濃度を一定に保つ方法を提供するものである。
すなわち、本発明は、水切り乾燥すべき物品をＲ
−113及びエタノールの混合物の液又は蒸気浴中
に浸漬し、水切り乾燥する方法において、前記浴
中のエタノール濃度を機器分析計により検知し、
濃度調整液を浴中へ補充することにより、前記エ
タノール濃度を制御することを特徴とする水切り
乾燥方法に関するものである。
通常の水切り乾燥においては、Ｒ−113／エタ
ノール混合物中のエタノール濃度が2wt％以下に
なると水切り速度が極端に低下するため、少なく
とも3wt％以上とすることが好ましい。一方、物
品表面を離れた水を含むエタノールは、比重差に
よりＲ−113／エタノール混合液上に分離層を形
成するが、Ｒ−113／エタノール混合液中のエタ
ノール濃度が高くなると、前記水を含むエタノー
ル中の水に対するエタノール及びＲ−113の量が
増大し、蒸留分離の手間が増大することになる。
又、エタノール濃度が高いことは可燃性となるこ
とからも好ましくない。従つて、Ｒ−113／エタ
ノール混合物中のエタノール濃度は3wt％〜6wt
％の範囲とすることが望ましく、又水切り程度を
一定に保つためにはある一定値、例えば、通常の
操作においては3.5wt％前後とすることが望まし
い。
Ｒ−113／エタノール混合浴中のエタノール濃
度を制御するためにはまず機器分析計により浴中
のエタノール濃度を測定し、所定値以下であれば
濃度調整液のエタノール濃度の高いものを浴中に
補充し、所定値以上であればエタノール濃度の低
いものを浴中に補充する。通常の水切り操作にお
いては、浴中のエタノール濃度が次第に減少する
方向であり、濃度調整液の補充は、浴中のエタノ
ール濃度が減少することを防止するために行うこ
とになる。濃度調整液の濃度は物品を介して浴中
に持ち込まれる水分量が多い場合には、高濃度
を、少ない場合には低濃度を採用すれば、調整液
の補充は、連続的に又は断続的に行えばよい。濃
度調整液はＲ−113／エタノール混合液が、浴中
に部分的に大きな濃度変化を与えないために好ま
しいが、Ｒ−113単独又はエタノール単独の調整
液でよい。Ｒ−113／エタノール混合蒸気浴は、
Ｒ−113／エタノール混合液上に形成するのが通
常であり、蒸気浴中のエタノール濃度調整は、下
部のＲ−113／エタノール混合液中に濃度調整液
を補充することにより行えばよい。又、エタノー
ル濃度の測定は、上記層又は下部の液層で行えば
よい。蒸気浴の場合には、浴中の温度を変えるこ
とによりエタノール濃度を調整することもでき
る。機器分析計としては、応答が速く、連続的に
簡易に測定できることから、赤外吸光光度計が好
ましいが、その他の吸光又は分光分析計、又はガ
スクロマトグラフでもよい。
Ｒ−113／エタノール混合浴中のエタノール濃
度の変動は水切り乾燥すべき物品により持ち込ま
れる水分量が多くなる程大きくなるため、エタノ
ール濃度制御を有効に行うためには、物品をＲ−
113／エタノール混合浴中に浸漬するに先立ち、
Ｒ−113単独浴浸漬し、約90〜95％の水切りを予
め実施することが好ましい。Ｒ−113の単独浴は、
超音波振動を与えた沸騰浴が水切り速度が速く
又、物品表面の微細空間部の水分を良く除去でき
ることから好ましいが、Ｒ−113の蒸気浴であつ
てもよい。超音波振動エネルギーは、単独浴１
当り、10〜15Wが適当である。水切り乾燥すべき
物品の種類や物品表面の水分量により、Ｒ−
113／エタンノール混合浴中の最適なエタノール
濃度が多少変化するため、予め大部分の水分をＲ
−113単独浴中で除去した後の方が物品の変化に
とらわれない安定した水切りが可能となる。もち
ろん、物品の変化に応じて、Ｒ−113／エタノー
ル混合浴中のエタノール濃度を最適値に設定する
操作も容易に行うことができる。エタノール濃度
制御ができるＲ−113／エタノール混合浴におい
て、物品表面の水分を99％除去し、その後Ｒ−
113／エタノール混合冷液浴あるいはさらにＲ−
113／エタノール混合蒸気浴に物品を浸漬して100
％の除去を行う操作が通常である。これら冷液浴
や蒸気浴では分離蓄積する水分がほとんどなく、
必ずしもエタノール濃度制御を実施しなくともよ
い。
［実施例］
付着水10ｇを有する150×100×１mmのガラス板
18枚を同時に、１分間隔でＲ−113の沸騰浴（超
音波を与える。以下第１槽という）→重量比96／
４のＲ−113／エタノール常温浴（超音波を与え
る。以下第２槽という）→重量比96／４のＲ−
113／エタノール冷浴（約15℃、以下第３槽とい
う）→重量比96／４のＲ−113／エタノール蒸気
浴（以下第４槽という）に順次浸漬し引き上げる
ことにより水切りを連続的に行つた。第１〜４槽
はともに容量約40である。浸漬時間は各槽とも
に１分間であり、脱水率はガラス板を引き上げた
後15秒経過後の時点での重量変化により測定し
た。赤外吸光光度計により第２槽中のエタノール
濃度を常に検知し、又、エタノール濃度調整液で
ある重量比75／25のＲ−113／エタノール液を約
700ｇ／hrの割合で連続的に第２槽へ供給するこ
とにより、第２槽中のエタノール濃度を約3.5wt
％に維持した。第１〜４槽の各槽から引き上げた
ガラス板の脱水率を水切り開始１時間後及び20時
間後について測定し、結果を次表に示す。
[Industrial Application Field] The present invention relates to a draining and drying method for removing moisture from the surface of a solid article. [Prior Art] Methods for removing moisture adhering to the surfaces of metals, plastics, glass, and other solid articles include natural or hot air drying methods, centrifugal dehydration methods, and methods using water-soluble solvents such as alcohol and acetone. Alternatively, a method using a mixture of fluorocarbons such as 1,1,2-trichloro-1,2,2-trifluoroethane (hereinafter referred to as R-113), alcohol, or a surfactant is known. As products that require draining and drying become more precise, such as optical equipment and semiconductor-related parts, the quality of draining and drying often has a direct impact on the reliability of component performance, and a stable and reliable draining and drying method is required. ing. [Problems to be Solved by the Invention] Among various draining and drying methods, the method using a mixture of R-113 and an alcohol such as methanol, ethanol, or isopropanol, especially R-113 and ethanol, is non-flammable. It is considered to be an effective method because the dewatering speed is fast and drying stains are unlikely to remain on the surface of the product after drying. When the article to be drained and dried is immersed in a mixture of R-113 and ethanol,
Moisture on the surface of the article leaves the surface of the article due to the action of ethanol, and the ethanol containing water separates onto the mixed liquid of R-113 and ethanol due to the difference in specific gravity. The ethanol aqueous solution separated into the upper layer will be distilled to recover the ethanol, and the water will be discharged. Therefore, the ethanol concentration in the R-113/ethanol mixture gradually decreases, requiring replenishment of ethanol. On the other hand, the dehydration rate is R-113/
It is necessary to control the ethanol concentration at a constant level because the ethanol concentration in the ethanol mixture decreases rapidly when it falls below a certain value, and when the ethanol concentration increases, it becomes flammable. Keeping the ethanol concentration constant also provides a constant draining ability, which is particularly desirable for draining precision parts. However, it is not easy to measure the amount of ethanol reduced because it adheres to the surface of the product and dries naturally.
Since R-113 also decreases at the same time, it is not a problem that the concentration can be kept constant by replenishing the amount of ethanol that has decreased. [Means for Solving the Problems] The present invention provides a method for keeping the ethanol concentration constant during draining and drying using liquid or steam of an R-113/ethanol mixture.
That is, the present invention provides R
- A method of immersing in a liquid or steam bath of a mixture of -113 and ethanol, and draining and drying, detecting the ethanol concentration in the bath with an instrumental analyzer,
The present invention relates to a draining drying method characterized in that the ethanol concentration is controlled by replenishing the bath with a concentration adjusting solution. In normal draining and drying, if the ethanol concentration in the R-113/ethanol mixture is less than 2 wt%, the draining speed will be extremely reduced, so it is preferably at least 3 wt% or more. On the other hand, ethanol containing water that has left the surface of the product forms a separated layer on the R-113/ethanol mixture due to the difference in specific gravity, but as the ethanol concentration in the R-113/ethanol mixture increases, the water The amounts of ethanol and R-113 relative to the water contained in the ethanol will increase, and the effort for distillation separation will increase.
Further, a high concentration of ethanol is not preferable because it becomes flammable. Therefore, the ethanol concentration in the R-113/ethanol mixture is between 3wt% and 6wt%.
% range, and in order to keep the degree of water removal constant, it is desirable to set it to a certain value, for example, around 3.5 wt% in normal operation. To control the ethanol concentration in the R-113/ethanol mixed bath, first measure the ethanol concentration in the bath using an instrument analyzer, and if it is below a predetermined value, add a concentration adjustment solution with a high ethanol concentration to the bath. If the ethanol concentration is above a predetermined value, ethanol with a lower concentration is added to the bath. In a normal draining operation, the ethanol concentration in the bath gradually decreases, and the concentration adjustment liquid is replenished to prevent the ethanol concentration in the bath from decreasing. If the concentration of the concentration adjustment liquid is high when the amount of water brought into the bath via the article is large, and when it is small, a low concentration is adopted, and the adjustment liquid can be replenished continuously or intermittently. You can go to A mixed solution of R-113/ethanol is preferred as the concentration adjusting solution because it does not cause a large concentration change locally in the bath, but an adjusting solution of R-113 alone or ethanol alone may be used. The R-113/ethanol mixed steam bath is
It is usually formed on an R-113/ethanol mixed solution, and the ethanol concentration in the steam bath can be adjusted by replenishing the lower R-113/ethanol mixed solution with a concentration adjusting solution. Further, the ethanol concentration may be measured in the above layer or the lower liquid layer. In the case of a steam bath, the ethanol concentration can also be adjusted by changing the temperature in the bath. As the instrument analyzer, an infrared absorption photometer is preferred because it has a quick response and can easily carry out continuous measurements, but other absorption or spectrometers or gas chromatographs may also be used. Fluctuations in the ethanol concentration in the R-113/ethanol mixed bath increase as the amount of water brought in by the articles to be drained and dried increases. Therefore, in order to effectively control the ethanol concentration, it is necessary to keep the articles in the R-113/ethanol mixed bath.
113/Prior to immersion in the ethanol mixed bath,
It is preferable to soak R-113 alone in a bath and drain about 90 to 95% of the water beforehand. A single bath of R-113 is
A boiling bath to which ultrasonic vibrations are applied is preferred because it has a fast draining speed and can effectively remove water from minute spaces on the surface of the article, but an R-113 steam bath may also be used. Ultrasonic vibration energy is applied to a single bath 1
10 to 15W is appropriate. R-
113/Ethanol Since the optimal ethanol concentration in the mixed bath will change slightly, remove most of the water in advance.
-113 After removing in a separate bath, stable water removal is possible without being affected by changes in the product. Of course, it is also possible to easily set the ethanol concentration in the R-113/ethanol mixed bath to an optimum value depending on changes in the product. In an R-113/ethanol mixed bath where the ethanol concentration can be controlled, 99% of the moisture on the surface of the article is removed, and then R-113 is used.
113/ethanol mixed cold liquid bath or further R-
113/100 by immersing the article in an ethanol mixed steam bath
% removal is the usual operation. In these cold liquid baths and steam baths, almost no moisture separates and accumulates,
Ethanol concentration control does not necessarily have to be carried out. [Example] 150 x 100 x 1 mm glass plate with 10 g of attached water
18 sheets were placed in an R-113 boiling bath (applies ultrasonic waves, hereinafter referred to as the 1st tank) at the same time at 1-minute intervals → weight ratio 96/
4 R-113/ethanol room temperature bath (gives ultrasonic waves. Hereinafter referred to as 2nd bath) → R- with a weight ratio of 96/4
113/ethanol cold bath (approximately 15°C, hereinafter referred to as the 3rd tank) → R-113/ethanol steam bath (hereinafter referred to as the 4th tank) with a weight ratio of 96/4. Ivy. The first to fourth tanks each have a capacity of about 40. The immersion time was 1 minute in each tank, and the dehydration rate was measured by the change in weight 15 seconds after the glass plate was pulled up. The ethanol concentration in the second tank was constantly detected using an infrared absorption photometer, and the R-113/ethanol solution with a weight ratio of 75/25 was added to the ethanol concentration adjustment solution.
By continuously supplying ethanol to the second tank at a rate of 700g/hr, the ethanol concentration in the second tank is reduced to approximately 3.5wt.
% was maintained. The dehydration rate of the glass plate taken out from each of the first to fourth tanks was measured 1 hour and 20 hours after the start of draining, and the results are shown in the table below.
【表】
［発明の効果］
Ｒ−113／エタノール混合浴により、物品表面
の水切りを行う場合、混合浴中のエタノール濃度
により水切り時間が異なるため、安定した水切り
を行うためにはエタノール濃度を制御しなければ
ならない。本発明方法に従えば、水切り浴のエタ
ノール濃度を直接検知し、随時濃度調整液を補充
できるため、エタノール濃度変化を最小に抑える
ことが可能である。これにより、連続的な水切り
乾燥操作においても、水切り程度が一定した結果
を得ることができる。一方、水切り乾燥すべき物
品の種類や物品表面の水分量により、Ｒ−113／
エタノール混合浴中の最適なエタノール濃度が存
在するが、このような物品の切り換えに応じた、
エタノール濃度設定も同様にして容易に行い得
る。[Table] [Effect of the invention] When draining the surface of an article using an R-113/ethanol mixed bath, the draining time varies depending on the ethanol concentration in the mixed bath, so in order to perform stable draining, the ethanol concentration must be controlled. Must. According to the method of the present invention, the ethanol concentration in the draining bath can be directly detected and the concentration adjustment liquid can be replenished at any time, making it possible to minimize changes in the ethanol concentration. Thereby, even in continuous draining and drying operations, a constant level of draining can be obtained. On the other hand, R-113/
Although there is an optimal ethanol concentration in the ethanol mixed bath, depending on the switching of such articles,
The ethanol concentration can also be easily set in the same manner.
Claims (1)
クロロ−１，２，２−トリフルオロエタン及びエ
タノールの混合物の液又は蒸気浴中に浸漬し水切
り乾燥する方法において、前記浴中のエタノール
濃度を機器分析計により検知し、濃度調整液を浴
中へ補充することにより、前記エタノール濃度を
制御することを特徴とする水切り乾燥方法。 ２ 機器分析計が赤外吸光光度計である特許請求
の範囲第１項記載の水切り乾燥方法。 ３ 濃度調整液が１，１，２−トリクロロ−１，
２，２−トリフルオロエンタン及びエタノールの
混合液である特許請求の範囲第１項記載の水切り
乾燥方法。 ４ 水切り乾燥すべき物品を、１，１，２−トリ
クロロ−１，２，２−トリフルオロエタン及びエ
タノールの混合物の液又は蒸気浴中に浸漬し水切
りするに先立ち、１，１，２−トリクロロ−１，
２，２−トリフルオロエタンの単独浴中に浸漬す
る特許請求の範囲第１項記載の水切り乾燥方法。 ５ １，１，２−トリクロロ−１，２，２−トリ
フルオロエタンの単独浴が１，１，２−トリクロ
ロ−１，２，２−トリフルオロエタンの沸騰浴で
ある特許請求の範囲第４項記載の水切り乾燥方
法。 ６ １，１，２−トリクロロ−１，２，２−トリ
フルオロエタンの単独浴が超音波振動により攪拌
されている特許請求の範囲第４項記載の水切り乾
燥方法。[Claims] 1. A method of draining and drying an article by immersing it in a liquid or steam bath of a mixture of 1,1,2-trichloro-1,2,2-trifluoroethane and ethanol, A draining and drying method characterized in that the ethanol concentration in the bath is controlled by detecting the ethanol concentration in the bath using an instrumental analyzer and replenishing the bath with a concentration adjusting solution. 2. The draining and drying method according to claim 1, wherein the instrument analyzer is an infrared absorption photometer. 3 The concentration adjustment solution is 1,1,2-trichloro-1,
The draining and drying method according to claim 1, wherein the liquid mixture is a mixture of 2,2-trifluoroethane and ethanol. 4. Prior to draining, soak the article to be dried in a liquid or steam bath of a mixture of 1,1,2-trichloro-1,2,2-trifluoroethane and ethanol and drain. -1,
The draining and drying method according to claim 1, which comprises immersing the method in a single bath of 2,2-trifluoroethane. 5 Claim 4, wherein the single bath of 1,1,2-trichloro-1,2,2-trifluoroethane is a boiling bath of 1,1,2-trichloro-1,2,2-trifluoroethane. Drying method described in section. 6. The draining and drying method according to claim 4, wherein the single bath of 1,1,2-trichloro-1,2,2-trifluoroethane is stirred by ultrasonic vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27197984A JPS61149204A (en) | 1984-12-25 | 1984-12-25 | Drainage drying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27197984A JPS61149204A (en) | 1984-12-25 | 1984-12-25 | Drainage drying method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61149204A JPS61149204A (en) | 1986-07-07 |
| JPS6315002B2 true JPS6315002B2 (en) | 1988-04-02 |
Family
ID=17507458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27197984A Granted JPS61149204A (en) | 1984-12-25 | 1984-12-25 | Drainage drying method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149204A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0632797B2 (en) * | 1990-08-30 | 1994-05-02 | ジャパン・フィールド株式会社 | Cleaning method and apparatus using alcohol |
| CN1173785C (en) * | 1994-10-19 | 2004-11-03 | 东芝硅株式会社 | Cleaning agent, method and equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5328142U (en) * | 1976-08-18 | 1978-03-10 | ||
| JPS55131675A (en) * | 1979-03-31 | 1980-10-13 | Daikin Ind Ltd | Method and washing liquid for removing adhering water from surface of article |
-
1984
- 1984-12-25 JP JP27197984A patent/JPS61149204A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5328142U (en) * | 1976-08-18 | 1978-03-10 | ||
| JPS55131675A (en) * | 1979-03-31 | 1980-10-13 | Daikin Ind Ltd | Method and washing liquid for removing adhering water from surface of article |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61149204A (en) | 1986-07-07 |
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