JPS63149960U - - Google Patents

Info

Publication number
JPS63149960U
JPS63149960U JP4026087U JP4026087U JPS63149960U JP S63149960 U JPS63149960 U JP S63149960U JP 4026087 U JP4026087 U JP 4026087U JP 4026087 U JP4026087 U JP 4026087U JP S63149960 U JPS63149960 U JP S63149960U
Authority
JP
Japan
Prior art keywords
insulating material
heat
heat insulating
heat treatment
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4026087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4026087U priority Critical patent/JPS63149960U/ja
Publication of JPS63149960U publication Critical patent/JPS63149960U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP4026087U 1987-03-19 1987-03-19 Pending JPS63149960U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4026087U JPS63149960U (US20020051482A1-20020502-M00012.png) 1987-03-19 1987-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4026087U JPS63149960U (US20020051482A1-20020502-M00012.png) 1987-03-19 1987-03-19

Publications (1)

Publication Number Publication Date
JPS63149960U true JPS63149960U (US20020051482A1-20020502-M00012.png) 1988-10-03

Family

ID=30854194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4026087U Pending JPS63149960U (US20020051482A1-20020502-M00012.png) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPS63149960U (US20020051482A1-20020502-M00012.png)

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