JPS63149554U - - Google Patents
Info
- Publication number
- JPS63149554U JPS63149554U JP4283687U JP4283687U JPS63149554U JP S63149554 U JPS63149554 U JP S63149554U JP 4283687 U JP4283687 U JP 4283687U JP 4283687 U JP4283687 U JP 4283687U JP S63149554 U JPS63149554 U JP S63149554U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- pressure sensor
- semiconductor
- semiconductor substrate
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005488 sandblasting Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4283687U JPS63149554U (OSRAM) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4283687U JPS63149554U (OSRAM) | 1987-03-24 | 1987-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149554U true JPS63149554U (OSRAM) | 1988-10-03 |
Family
ID=30859133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4283687U Pending JPS63149554U (OSRAM) | 1987-03-24 | 1987-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149554U (OSRAM) |
-
1987
- 1987-03-24 JP JP4283687U patent/JPS63149554U/ja active Pending
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