JPS63149228U - - Google Patents
Info
- Publication number
- JPS63149228U JPS63149228U JP3848387U JP3848387U JPS63149228U JP S63149228 U JPS63149228 U JP S63149228U JP 3848387 U JP3848387 U JP 3848387U JP 3848387 U JP3848387 U JP 3848387U JP S63149228 U JPS63149228 U JP S63149228U
- Authority
- JP
- Japan
- Prior art keywords
- drive device
- vacuum
- bellows
- drive
- connection portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848387U JPS63149228U (enExample) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848387U JPS63149228U (enExample) | 1987-03-18 | 1987-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149228U true JPS63149228U (enExample) | 1988-09-30 |
Family
ID=30850774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3848387U Pending JPS63149228U (enExample) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149228U (enExample) |
-
1987
- 1987-03-18 JP JP3848387U patent/JPS63149228U/ja active Pending