JPS63149228U - - Google Patents

Info

Publication number
JPS63149228U
JPS63149228U JP3848387U JP3848387U JPS63149228U JP S63149228 U JPS63149228 U JP S63149228U JP 3848387 U JP3848387 U JP 3848387U JP 3848387 U JP3848387 U JP 3848387U JP S63149228 U JPS63149228 U JP S63149228U
Authority
JP
Japan
Prior art keywords
drive device
vacuum
bellows
drive
connection portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3848387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3848387U priority Critical patent/JPS63149228U/ja
Publication of JPS63149228U publication Critical patent/JPS63149228U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例である真空装置用駆
動装置を示す縦断面図、第２図は第１図の係合部
の斜視図である。 １…真空容器、２…ベローズ、３…ピン、４…
カラー、５…止め輪、６ａ，６ｂ…ガイド、７…
エアシリンダ、８…シリンダ取付座、９…シリン
ダロツド、１０…ジヨイント、１１…ブラケツト
、１２…突起、１３…矩形穴、１４ａ，１４ｂ…
位置決め穴、１５…位置決めピン。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空容器内へベローズを介して動力を伝達する
    真空装置用駆動装置において、真空容器と駆動装
    置との結合部および駆動装置の駆動部とベローズ
    との結合部をそれぞれピン結合とし駆動装置を着
    脱可能としたことを特徴とする真空装置用駆動装
    置。
JP3848387U 1987-03-18 1987-03-18 Pending JPS63149228U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3848387U JPS63149228U (ja) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3848387U JPS63149228U (ja) 1987-03-18 1987-03-18

Publications (1)

Publication Number Publication Date
JPS63149228U true JPS63149228U (ja) 1988-09-30

Family

ID=30850774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3848387U Pending JPS63149228U (ja) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPS63149228U (ja)

Similar Documents

Publication Publication Date Title
JPS63149228U (ja)
JPH038649U (ja)
JPS6347889U (ja)
JPS62188684U (ja)
JPS6234178U (ja)
JPS63110650U (ja)
JPS62186818U (ja)
JPS63154757U (ja)
JPH0351609U (ja)
JPS6331503U (ja)
JPS61162508U (ja)
JPH0183985U (ja)
JPH02107554U (ja)
JPH0480021U (ja)
JPS63102580U (ja)
JPS61103390U (ja)
JPS61164442U (ja)
JPS63193722U (ja)
JPH0165216U (ja)
JPS6372880U (ja)
JPS62162333U (ja)
JPS6387252U (ja)
JPH0180815U (ja)
JPH0472436U (ja)
JPS61132420U (ja)