JPS63149058U - - Google Patents

Info

Publication number
JPS63149058U
JPS63149058U JP4142087U JP4142087U JPS63149058U JP S63149058 U JPS63149058 U JP S63149058U JP 4142087 U JP4142087 U JP 4142087U JP 4142087 U JP4142087 U JP 4142087U JP S63149058 U JPS63149058 U JP S63149058U
Authority
JP
Japan
Prior art keywords
sample
optical system
observation optical
depth
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4142087U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4142087U priority Critical patent/JPS63149058U/ja
Publication of JPS63149058U publication Critical patent/JPS63149058U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、本考案の一実施例の概略構成図である
。 ４……試料、７……Ｘ線分光器、１０……光学
顕微鏡の接眼部、１１……パルスモータ（駆動手
段）、１３……オートフオーカス機構。 The drawing is a schematic diagram of an embodiment of the present invention. 4... Sample, 7... X-ray spectrometer, 10... Eyepiece of optical microscope, 11... Pulse motor (driving means), 13... Auto focus mechanism.

Claims (1)

【実用新案登録請求の範囲】 試料に荷電粒子線を照射し、該試料から発生す
る信号を分光器で分光し、この分光した信号を検
出して分析を行なう表面分析装置において、 前記分光器の焦点深度に対応する焦点深度を有
する観察光学系と、 前記試料が載置された試料ステージを前記観察
光学系の光軸に沿う垂直軸方向に駆動する駆動手
段と、 前記観察光学系から導かれた試料の光学像に基
づいて、前記試料の分析位置が前記観察光学系の
合焦位置にくるように前記駆動手段を制御するオ
ートフオーカス機構とを備えることを特徴とする
表面分析装置。[Scope of Claim for Utility Model Registration] A surface analysis device that irradiates a sample with a charged particle beam, spectrally spectra signals generated from the sample using a spectrometer, and detects and analyzes the spectrometer signals, comprising: an observation optical system having a depth of focus corresponding to the depth of focus; a driving means for driving the sample stage on which the sample is placed in a vertical axis direction along the optical axis of the observation optical system; and an autofocus mechanism that controls the drive means so that the analysis position of the sample comes to a focused position of the observation optical system based on an optical image of the sample.
JP4142087U 1987-03-20 1987-03-20 Pending JPS63149058U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4142087U JPS63149058U (en) 1987-03-20 1987-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4142087U JPS63149058U (en) 1987-03-20 1987-03-20

Publications (1)

Publication Number Publication Date
JPS63149058U true JPS63149058U (en) 1988-09-30

Family

ID=30856405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4142087U Pending JPS63149058U (en) 1987-03-20 1987-03-20

Country Status (1)

Country Link
JP (1) JPS63149058U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012093474A1 (en) * 2011-01-05 2012-07-12 Isobe Shinichiro Multiple light source microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189856A (en) * 1984-03-10 1985-09-27 Jeol Ltd X-ray microanalyzer and similar device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189856A (en) * 1984-03-10 1985-09-27 Jeol Ltd X-ray microanalyzer and similar device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012093474A1 (en) * 2011-01-05 2012-07-12 Isobe Shinichiro Multiple light source microscope

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