JPS63149057U - - Google Patents
Info
- Publication number
- JPS63149057U JPS63149057U JP4056487U JP4056487U JPS63149057U JP S63149057 U JPS63149057 U JP S63149057U JP 4056487 U JP4056487 U JP 4056487U JP 4056487 U JP4056487 U JP 4056487U JP S63149057 U JPS63149057 U JP S63149057U
- Authority
- JP
- Japan
- Prior art keywords
- anode
- electron beam
- holder
- anode holder
- exhaust hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056487U JPH0546202Y2 (enExample) | 1987-03-19 | 1987-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056487U JPH0546202Y2 (enExample) | 1987-03-19 | 1987-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63149057U true JPS63149057U (enExample) | 1988-09-30 |
| JPH0546202Y2 JPH0546202Y2 (enExample) | 1993-12-02 |
Family
ID=30854762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4056487U Expired - Lifetime JPH0546202Y2 (enExample) | 1987-03-19 | 1987-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546202Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002358920A (ja) * | 2001-06-01 | 2002-12-13 | Ulvac Japan Ltd | 荷電粒子線装置 |
-
1987
- 1987-03-19 JP JP4056487U patent/JPH0546202Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002358920A (ja) * | 2001-06-01 | 2002-12-13 | Ulvac Japan Ltd | 荷電粒子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546202Y2 (enExample) | 1993-12-02 |