JPS63148870U - - Google Patents
Info
- Publication number
- JPS63148870U JPS63148870U JP1988028603U JP2860388U JPS63148870U JP S63148870 U JPS63148870 U JP S63148870U JP 1988028603 U JP1988028603 U JP 1988028603U JP 2860388 U JP2860388 U JP 2860388U JP S63148870 U JPS63148870 U JP S63148870U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- gas
- rate sensor
- casing
- pump chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 4
- 239000012528 membrane Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988028603U JPS63148870U (de) | 1988-03-03 | 1988-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988028603U JPS63148870U (de) | 1988-03-03 | 1988-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63148870U true JPS63148870U (de) | 1988-09-30 |
Family
ID=30831722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988028603U Pending JPS63148870U (de) | 1988-03-03 | 1988-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148870U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10185939A (ja) * | 1996-12-24 | 1998-07-14 | Tamagawa Seiki Co Ltd | ガスレートセンサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104279A (en) * | 1976-02-25 | 1977-09-01 | United Technologies Corp | Integral fluid type angular velocity detector |
-
1988
- 1988-03-03 JP JP1988028603U patent/JPS63148870U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104279A (en) * | 1976-02-25 | 1977-09-01 | United Technologies Corp | Integral fluid type angular velocity detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10185939A (ja) * | 1996-12-24 | 1998-07-14 | Tamagawa Seiki Co Ltd | ガスレートセンサ |