JPS63147262U - - Google Patents

Info

Publication number
JPS63147262U
JPS63147262U JP4115887U JP4115887U JPS63147262U JP S63147262 U JPS63147262 U JP S63147262U JP 4115887 U JP4115887 U JP 4115887U JP 4115887 U JP4115887 U JP 4115887U JP S63147262 U JPS63147262 U JP S63147262U
Authority
JP
Japan
Prior art keywords
polishing tool
pressure
displacement
amount
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4115887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448927Y2 (US20100012521A1-20100121-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987041158U priority Critical patent/JPH0448927Y2/ja
Priority to US07/169,060 priority patent/US4974368A/en
Publication of JPS63147262U publication Critical patent/JPS63147262U/ja
Priority to US07/569,386 priority patent/US4999954A/en
Application granted granted Critical
Publication of JPH0448927Y2 publication Critical patent/JPH0448927Y2/ja
Priority to US08/157,440 priority patent/US5347763A/en
Expired legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1987041158U 1987-03-19 1987-03-19 Expired JPH0448927Y2 (US20100012521A1-20100121-C00001.png)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1987041158U JPH0448927Y2 (US20100012521A1-20100121-C00001.png) 1987-03-19 1987-03-19
US07/169,060 US4974368A (en) 1987-03-19 1988-03-16 Polishing apparatus
US07/569,386 US4999954A (en) 1987-03-19 1990-08-15 Polishing apparatus
US08/157,440 US5347763A (en) 1987-03-19 1993-11-26 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987041158U JPH0448927Y2 (US20100012521A1-20100121-C00001.png) 1987-03-19 1987-03-19

Publications (2)

Publication Number Publication Date
JPS63147262U true JPS63147262U (US20100012521A1-20100121-C00001.png) 1988-09-28
JPH0448927Y2 JPH0448927Y2 (US20100012521A1-20100121-C00001.png) 1992-11-18

Family

ID=30855900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987041158U Expired JPH0448927Y2 (US20100012521A1-20100121-C00001.png) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPH0448927Y2 (US20100012521A1-20100121-C00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184671A (en) * 1981-05-11 1982-11-13 Hitachi Ltd Machining device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184671A (en) * 1981-05-11 1982-11-13 Hitachi Ltd Machining device

Also Published As

Publication number Publication date
JPH0448927Y2 (US20100012521A1-20100121-C00001.png) 1992-11-18

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