JPS63147259U - - Google Patents
Info
- Publication number
- JPS63147259U JPS63147259U JP1987041157U JP4115787U JPS63147259U JP S63147259 U JPS63147259 U JP S63147259U JP 1987041157 U JP1987041157 U JP 1987041157U JP 4115787 U JP4115787 U JP 4115787U JP S63147259 U JPS63147259 U JP S63147259U
- Authority
- JP
- Japan
- Prior art keywords
- polishing tool
- workpiece
- displacement amount
- predetermined position
- machining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
第１図は研磨工具先端の変位センサの配置を示
す図、第２図は本考案の構成説明図、第３図は制
御系ブロツク図、第４図、第５図は研磨工具の変
位の説明図。
１……研磨工具、２，４……変位センサ、Ｍｘ
，Ｍｙ……モータ、１２，１４……ｘ，ｙ方向の
送りねじ、２０，２２……変位量計算手段、２８
，３０……補正値計算手段。
Fig. 1 is a diagram showing the arrangement of the displacement sensor at the tip of the polishing tool, Fig. 2 is an explanatory diagram of the configuration of the present invention, Fig. 3 is a control system block diagram, and Figs. 4 and 5 are explanations of the displacement of the polishing tool. figure. 1... Polishing tool, 2, 4... Displacement sensor, Mx
, My... Motor, 12, 14... Feed screw in x and y directions, 20, 22... Displacement calculation means, 28
, 30... Correction value calculation means.
Claims (1)
手段と、加工中の研磨工具の前記所定位置からの
変位量を検出する手段を有し、 前記変位量量検出手段の信号に基づいて前記研
磨工具又は加工物を移動することを特徴とする研
磨工具の加工位置制御装置。[Claims for Utility Model Registration] A means for setting a polishing tool at a predetermined position on a machined surface of a workpiece, and a means for detecting a displacement amount of the polishing tool from the predetermined position during machining, the detection of the displacement amount. A machining position control device for a polishing tool, characterized in that the polishing tool or the workpiece is moved based on a signal from a means.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987041157U JPS63147259U (en) | 1987-03-19 | 1987-03-19 | |
| US07/169,060 US4974368A (en) | 1987-03-19 | 1988-03-16 | Polishing apparatus |
| US07/569,386 US4999954A (en) | 1987-03-19 | 1990-08-15 | Polishing apparatus |
| US08/157,440 US5347763A (en) | 1987-03-19 | 1993-11-26 | Polishing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987041157U JPS63147259U (en) | 1987-03-19 | 1987-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63147259U true JPS63147259U (en) | 1988-09-28 |
Family
ID=30855898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987041157U Pending JPS63147259U (en) | 1987-03-19 | 1987-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63147259U (en) |
-
1987
- 1987-03-19 JP JP1987041157U patent/JPS63147259U/ja active Pending
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