JPS63145856U - - Google Patents
Info
- Publication number
- JPS63145856U JPS63145856U JP3719287U JP3719287U JPS63145856U JP S63145856 U JPS63145856 U JP S63145856U JP 3719287 U JP3719287 U JP 3719287U JP 3719287 U JP3719287 U JP 3719287U JP S63145856 U JPS63145856 U JP S63145856U
- Authority
- JP
- Japan
- Prior art keywords
- ceramics
- evaporation tank
- lined
- iron
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 13
- 238000001704 evaporation Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 4
- 229910052742 iron Inorganic materials 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910052681 coesite Inorganic materials 0.000 claims 1
- 229910052906 cristobalite Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000010445 mica Substances 0.000 claims 1
- 229910052618 mica group Inorganic materials 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 229910052682 stishovite Inorganic materials 0.000 claims 1
- 229910052905 tridymite Inorganic materials 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987037192U JPH06449Y2 (ja) | 1987-03-16 | 1987-03-16 | 真空蒸着めつき装置の蒸発槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987037192U JPH06449Y2 (ja) | 1987-03-16 | 1987-03-16 | 真空蒸着めつき装置の蒸発槽 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63145856U true JPS63145856U (enrdf_load_stackoverflow) | 1988-09-27 |
| JPH06449Y2 JPH06449Y2 (ja) | 1994-01-05 |
Family
ID=30848301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987037192U Expired - Lifetime JPH06449Y2 (ja) | 1987-03-16 | 1987-03-16 | 真空蒸着めつき装置の蒸発槽 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06449Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI264473B (en) * | 2001-10-26 | 2006-10-21 | Matsushita Electric Works Ltd | Vacuum deposition device and vacuum deposition method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5811784A (ja) * | 1981-07-14 | 1983-01-22 | コムビナ−ト・フアウ・エ−・ベ−・ロコモ−テイフバウ−エレクトロテヒニツシエ・ウエルケ“ハンス・バイムレル” | 亜鉛蒸発器 |
-
1987
- 1987-03-16 JP JP1987037192U patent/JPH06449Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5811784A (ja) * | 1981-07-14 | 1983-01-22 | コムビナ−ト・フアウ・エ−・ベ−・ロコモ−テイフバウ−エレクトロテヒニツシエ・ウエルケ“ハンス・バイムレル” | 亜鉛蒸発器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06449Y2 (ja) | 1994-01-05 |