JPS63145609U - - Google Patents
Info
- Publication number
- JPS63145609U JPS63145609U JP3968487U JP3968487U JPS63145609U JP S63145609 U JPS63145609 U JP S63145609U JP 3968487 U JP3968487 U JP 3968487U JP 3968487 U JP3968487 U JP 3968487U JP S63145609 U JPS63145609 U JP S63145609U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- breaking
- breaking device
- jig
- backside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000002390 adhesive tape Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3968487U JPS63145609U (cs) | 1987-03-17 | 1987-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3968487U JPS63145609U (cs) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145609U true JPS63145609U (cs) | 1988-09-26 |
Family
ID=30853084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3968487U Pending JPS63145609U (cs) | 1987-03-17 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145609U (cs) |
-
1987
- 1987-03-17 JP JP3968487U patent/JPS63145609U/ja active Pending