JPS63145592U - - Google Patents

Info

Publication number
JPS63145592U
JPS63145592U JP3258287U JP3258287U JPS63145592U JP S63145592 U JPS63145592 U JP S63145592U JP 3258287 U JP3258287 U JP 3258287U JP 3258287 U JP3258287 U JP 3258287U JP S63145592 U JPS63145592 U JP S63145592U
Authority
JP
Japan
Prior art keywords
chamber
vacuum
deaeration
pressure control
upper pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3258287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3258287U priority Critical patent/JPH024796Y2/ja
Publication of JPS63145592U publication Critical patent/JPS63145592U/ja
Application granted granted Critical
Publication of JPH024796Y2 publication Critical patent/JPH024796Y2/ja
Expired legal-status Critical Current

Links

JP3258287U 1987-03-07 1987-03-07 Expired JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3258287U JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-07 1987-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3258287U JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-07 1987-03-07

Publications (2)

Publication Number Publication Date
JPS63145592U true JPS63145592U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-26
JPH024796Y2 JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-05

Family

ID=30839398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3258287U Expired JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-07 1987-03-07

Country Status (1)

Country Link
JP (1) JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH024796Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-05

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