JPS63145324U - - Google Patents

Info

Publication number
JPS63145324U
JPS63145324U JP3883087U JP3883087U JPS63145324U JP S63145324 U JPS63145324 U JP S63145324U JP 3883087 U JP3883087 U JP 3883087U JP 3883087 U JP3883087 U JP 3883087U JP S63145324 U JPS63145324 U JP S63145324U
Authority
JP
Japan
Prior art keywords
gas
valve
reaction
exhaust
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3883087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3883087U priority Critical patent/JPS63145324U/ja
Publication of JPS63145324U publication Critical patent/JPS63145324U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP3883087U 1987-03-16 1987-03-16 Pending JPS63145324U (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3883087U JPS63145324U (Direct) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3883087U JPS63145324U (Direct) 1987-03-16 1987-03-16

Publications (1)

Publication Number Publication Date
JPS63145324U true JPS63145324U (Direct) 1988-09-26

Family

ID=30851444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3883087U Pending JPS63145324U (Direct) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPS63145324U (Direct)

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