JPS63143576U - - Google Patents
Info
- Publication number
- JPS63143576U JPS63143576U JP3697387U JP3697387U JPS63143576U JP S63143576 U JPS63143576 U JP S63143576U JP 3697387 U JP3697387 U JP 3697387U JP 3697387 U JP3697387 U JP 3697387U JP S63143576 U JPS63143576 U JP S63143576U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- jet
- processing
- processing device
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007747 plating Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3697387U JPS63143576U (ko) | 1987-03-12 | 1987-03-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3697387U JPS63143576U (ko) | 1987-03-12 | 1987-03-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63143576U true JPS63143576U (ko) | 1988-09-21 |
Family
ID=30847872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3697387U Pending JPS63143576U (ko) | 1987-03-12 | 1987-03-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63143576U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999045170A1 (en) * | 1998-03-02 | 1999-09-10 | Ebara Corporation | Substrate plating device |
-
1987
- 1987-03-12 JP JP3697387U patent/JPS63143576U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999045170A1 (en) * | 1998-03-02 | 1999-09-10 | Ebara Corporation | Substrate plating device |